ZZS box-based vacuum-plugging machine ZZS1300

ZZS box-based vacuum-plugging machine ZZS1300

Supplier
Rankuum
Part Number
ZZS1300
Category
Optical Production Equipment
Origin
China

• A box-type structure with the vacuum system at the rear facilitates operation and maintenance. The flat exterior is easy to clean and particularly suitable for through-wall installation in a cleanroom. • The vacuum system has a high pumping speed, providing short evacuation times, high vacuum and short production cycles. • Tubular heaters provide baking with uniform temperature and long service life. The maximum baking temperature is 350℃, and the stated baking uniformity is 270℃±10℃. • Workpiece rotation is driven from the upper center, with water-cooled bearings and magnetic-fluid seals for smooth, reliable operation. • A quartz-crystal film-thickness controller enables automatic control of the coating process. • The equipment uses an optimized coating-control system with an attractive, practical operator interface, providing stable, reliable manual, semiautomatic and fully automatic operation.

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Overview

• A box-type structure with the vacuum system at the rear facilitates operation and maintenance. The flat exterior is easy to clean and particularly suitable for through-wall installation in a cleanroom. • The vacuum system has a high pumping speed, providing short evacuation times, high vacuum and short production cycles. • Tubular heaters provide baking with uniform temperature and long service life. The maximum baking temperature is 350℃, and the stated baking uniformity is 270℃±10℃. • Workpiece rotation is driven from the upper center, with water-cooled bearings and magnetic-fluid seals for smooth, reliable operation. • A quartz-crystal film-thickness controller enables automatic control of the coating process. • The equipment uses an optimized coating-control system with an attractive, practical operator interface, providing stable, reliable manual, semiautomatic and fully automatic operation.

Specifications

ParameterValue
Box size [Model: ZZS1300; Common Standard Configuration]Φ1300x1500
Vacuum systems - limit vacuum [Model: ZZS1300; Common Standard Configuration]≤3.0×10⁻⁴
Vacuum systems -- restoration of vacuum [Model: ZZS1300; Common Standard Configuration; whole chain of original restoration vacuums]4×10⁻³Pa ≤15min
Vacuum system -- recommended configuration [Model: ZZS1300; Common Standard Configuration]Molecular, Rotz and direct pumps
Vacuum system - Optional configuration [Model: ZZS1300; Common Standard Configuration; Selection Original]A. Low temperature, Rotz and direct pumps; B., proliferation, Rotz and direct pumps
Vacuum measurement [Model: ZZS1300; Common Standard Configuration; Ploting and Selection Ranges retained respectively]Atmosphere~1×10⁻⁵Pa (standard); atmosphere~1×10⁻⁷Pa (optional)
Low temperature trapper [Model: ZZS1300; standard configuration commonly used; Note:*: proposed additions to the vacuum system when using molecular or diffuse pumps configurations; process-specific when using low temperature pumps]Match
Work packages [Model: ZZS1300; Common Standard Configuration]Integer (speculation); fan, planet, flip (select)
Baking. [Model: ZZS1300; Common Standard Configuration]Baking (coding); baking (choice-making)
Project baking system [Model: ZZS1300; Common Standard Configuration]Bread, pipe-like heater, maximum temperature 350°C, PID automatic temperature control and display
evaporation system - EPR source [Model: ZZS1300; Common Standard Configuration; Selection]4kw/group (selection)
Vapour system - Electronic beam evaporation source - multi-clause [Model: ZZS1300; Common Standard Configuration; Plot; Note ** Cave capacity 12cc/peath, with 20cc, 40cc]12 dens (marked)
Vapour system - E-beam evaporation source - dentex capacity [Model: ZZS1300; Common Standard Configuration; Note: **: 12cc/Live standard, 20cc or 40cc selected capacity]12cc/closure; options 20cc, 40cc
Imbrane thickness monitoring system -- Stone crystal membrane thicker [Model: ZZS1300; Common Standard Configuration]Single probe (marking); six probe (selection)
Membrane thickness monitoring system -- optical membrane thickness control unit [Model: ZZS1300; Common Standard Configuration; Selection; Type and Wave Original as a whole]Directly, 400 ~ 1100 nm (selection)
Ion Support [Model: ZZS1300; Common Standard Configuration; Selection]Halion ion source, hollow cathode ion source, Kaufman ion source, radio frequency ion source
Inflating system - pressure [Model: ZZS1300; Common Standard Configuration; Selection]≤0.1 MPa
Inflating system - flow [Model: ZZS1300; common standard configuration; optional; ≤0.1MPa]0~100sccm、0~200sccm
Energy requirements -- electricity [Model: ZZS1300; Common Standard Configuration; Three-System Lines; Note**** all calculated according to Standard Configuration, with different configurations confirmed with sales personnel]~50 kw
Energy requirements - cooling water temperature [Model: ZZS1300; common standard configuration; note**** all calculated according to standard configuration, with different configurations confirmed with sales personnel]20°C~28°C
Energy requirements - cooling water flows [Model: ZZS1300; Common Standard Configuration; 20°C ~ 28°C; Note **** all calculated according to Standard Configuration, with different configurations confirmed with sales staff]100 L/min
Energy requirements - compressed air [Model: ZZS1300; Common Standard Configuration]0.4MPa~0.8MPa
Overall Dimensions (W×H×D) [Model: ZZS1300; common standard configuration; Note**** all calculated according to standard configuration, with different configurations confirmed with the salesman; table unprinted, not completed mm]2100×2800×2005
Total equipment weight [Model: ZZS1300; Common Standard Configuration]3000 KG

Applications

For the production of IR-CUT filters, colour filters, high reflector film, AR film, long wavelength, short wavelength and various electron film.

Datasheet

Product Datasheet
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Supplier Information

Ra
Rankuum
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Chengdu Nanguang Machinery Co., Ltd. is one of the manufacturers in China's vacuum equipment industry and special equipment for the electronics industry. Its predecessor can be traced back to the Sichuan Machinery Bureau founded in 1877. After a century of vicissitudes, the company has now developed into a high-tech enterprise dedicated to the research, development, production, and sales of vacuum equipment. The company's products mainly cover two categories: vacuum acquisition equipment represented by vacuum pumps and vacuum systems, and vacuum application equipment represented by vacuum coating machines and vacuum industrial furnaces. In 1958, the company entered the field of vacuum equipment and began to develop vacuum acquisition equipment; in 1964, the company successfully developed China's first vacuum coating machine; after more than 60 years of development, it has become one of the enterprises with a long history, complete varieties, and a comprehensive technical system in the domestic vacuum equipment field. It is also a vacuum technology solution provider with comprehensive research and development capabilities for both vacuum acquisition equipment and vacuum application equipment in China.

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