ZZS box-based vacuum-plugging machine ZZS1100

ZZS box-based vacuum-plugging machine ZZS1100

Supplier
Rankuum
Part Number
ZZS1100
Category
Optical Production Equipment
Origin
China

• A box-type structure with the vacuum system at the rear facilitates operation and maintenance. The flat exterior is easy to clean and particularly suitable for through-wall installation in a cleanroom. • The vacuum system has a high pumping speed, providing short evacuation times, high vacuum and short production cycles. • Tubular heaters provide baking with uniform temperature and long service life. The maximum baking temperature is 350℃, and the stated baking uniformity is 270℃±10℃. • Workpiece rotation is driven from the upper center, with water-cooled bearings and magnetic-fluid seals for smooth, reliable operation. • A quartz-crystal film-thickness controller enables automatic control of the coating process. • The optimized coating-control system has an attractive, practical operator interface and provides stable, reliable manual, semiautomatic and fully automatic operation.

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Overview

• A box-type structure with the vacuum system at the rear facilitates operation and maintenance. The flat exterior is easy to clean and particularly suitable for through-wall installation in a cleanroom. • The vacuum system has a high pumping speed, providing short evacuation times, high vacuum and short production cycles. • Tubular heaters provide baking with uniform temperature and long service life. The maximum baking temperature is 350℃, and the stated baking uniformity is 270℃±10℃. • Workpiece rotation is driven from the upper center, with water-cooled bearings and magnetic-fluid seals for smooth, reliable operation. • A quartz-crystal film-thickness controller enables automatic control of the coating process. • The optimized coating-control system has an attractive, practical operator interface and provides stable, reliable manual, semiautomatic and fully automatic operation.

Specifications

ParameterValue
Box size [Model: ZZS1100; common standard configuration]Φ1100x1300
Vacuum systems - limit vacuum [Model: ZZS1100; common standard configuration]≤3.0×10⁻⁴
Vacuum systems -- restoration of vacuum [Model: ZZS1100; common standard configuration]4×10⁻³Pa ≤15min
Vacuum system -- recommended configuration [Model: ZZS1100; common standard configuration]Molecular, Rotz and direct pumps
Vacuum system - Optional configuration [Model: ZZS1100; common standard configuration; optional combination]A. Low temperature, Rotz and direct pumps; B., proliferation, Rotz and direct pumps
Vacuum measurement [Model: ZZS1100; common standard configuration; standard and optional ranges]Atmosphere~1×10⁻⁵Pa (standard); atmosphere~1×10⁻⁷Pa (optional)
Low temperature trapper [Model: ZZS1100; common standard configuration; recommended addition with molecular-pump or diffusion-pump configurations; with cryopump configurations, depends on the process]Match
Work packages [Model: ZZS1100; common standard configuration]Integer (speculation); fan, planet, flip (select)
Baking. [Model: ZZS1100; common standard configuration]Baking (coding); baking (choice-making)
Project baking system [Model: ZZS1100; common standard configuration]Bread, pipe-like heater, maximum temperature 350°C, PID automatic temperature control and display
evaporation system - EPR source [Model: ZZS1100; common standard configuration; optional]4kw/group (selection)
Vapour system - Electronic beam evaporation source - multi-clause [Model: ZZS1100; common standard configuration; standard; pocket-crucible capacity 12cc/pocket, with selectable 20cc or 40cc capacities]12 dens (marked)
Vapour system - E-beam evaporation source - dentex capacity [Model: ZZS1100; common standard configuration; standard capacity 12cc/pocket, with selectable 20cc or 40cc capacities]12cc/closure; options 20cc, 40cc
Vapour system - E-beam evaporation source - ring luminium [Model: ZZS1100; common standard configuration; the standard ring crucible has the same outer diameter as the associated pocket crucible; custom designs are available]Standard Configuration
Imbrane thickness monitoring system -- Stone crystal membrane thicker [Model: ZZS1100; common standard configuration]Single probe (marking); six probe (selection)
Membrane thickness monitoring system -- optical membrane thickness control unit [Model: ZZS1100; common standard configuration; optional]Directly, 400 ~ 1100 nm (selection)
Ion Support [Model: ZZS1100; common standard configuration; optional]Halion ion source, hollow cathode ion source, Kaufman ion source, radio frequency ion source
Inflating system - pressure [Model: ZZS1100; common standard configuration; optional]≤0.1 MPa
Inflating system - flow [Model: ZZS1100; common standard configuration; optional; ≤0.1MPa]0~100sccm、0~200sccm
Energy requirements -- electricity [Model: ZZS1100; common standard configuration; three-phase five-wire; calculated for the standard configuration]~50 kw
Energy requirements - cooling water temperature [Model: ZZS1100; common standard configuration; calculated for the standard configuration]20°C~28°C
Energy requirements - cooling water flows [Model: ZZS1100; common standard configuration; 20°C~28°C; calculated for the standard configuration]100 L/min
Energy requirements - compressed air [Model: ZZS1100; common standard configuration]0.4MPa~0.8MPa
Overall Dimensions (W×H×D) [Model: ZZS1100; common standard configuration; calculated for the standard configuration]2100×2600×2004
Total equipment weight [Model: ZZS1100; common standard configuration]2500 KG

Applications

For the production of IR-CUT filters, colour filters, high reflector film, AR film, long wavelength, short wavelength and various electron film.

Datasheet

Product Datasheet
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Supplier Information

Ra
Rankuum
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Chengdu Nanguang Machinery Co., Ltd. is one of the manufacturers in China's vacuum equipment industry and special equipment for the electronics industry. Its predecessor can be traced back to the Sichuan Machinery Bureau founded in 1877. After a century of vicissitudes, the company has now developed into a high-tech enterprise dedicated to the research, development, production, and sales of vacuum equipment. The company's products mainly cover two categories: vacuum acquisition equipment represented by vacuum pumps and vacuum systems, and vacuum application equipment represented by vacuum coating machines and vacuum industrial furnaces. In 1958, the company entered the field of vacuum equipment and began to develop vacuum acquisition equipment; in 1964, the company successfully developed China's first vacuum coating machine; after more than 60 years of development, it has become one of the enterprises with a long history, complete varieties, and a comprehensive technical system in the domestic vacuum equipment field. It is also a vacuum technology solution provider with comprehensive research and development capabilities for both vacuum acquisition equipment and vacuum application equipment in China.

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