ZZS box-based vacuum-plugging machine ZZS600

ZZS box-based vacuum-plugging machine ZZS600

Supplier
Rankuum
Part Number
ZZS600
Category
Optical Production Equipment
Origin
China

• A box-type structure with the vacuum system at the rear facilitates operation and maintenance. The flat exterior is easy to clean and particularly suitable for through-wall installation in a cleanroom. • The vacuum system has a high pumping speed, providing short evacuation times, high vacuum and short production cycles. • Tubular heaters provide baking with uniform temperature and long service life. The maximum baking temperature is 350℃, and the stated baking uniformity is 270℃±10℃. • Workpiece rotation is driven from the upper center, with water-cooled bearings and magnetic-fluid seals for smooth, reliable operation. • A quartz-crystal film-thickness controller enables automatic control of the coating process. • The optimized coating-control system has an attractive, practical operator interface and provides stable, reliable manual, semiautomatic and fully automatic operation.

Request a Quote Download Datasheet
Save to Favorites Save to Favorites

Overview

• A box-type structure with the vacuum system at the rear facilitates operation and maintenance. The flat exterior is easy to clean and particularly suitable for through-wall installation in a cleanroom. • The vacuum system has a high pumping speed, providing short evacuation times, high vacuum and short production cycles. • Tubular heaters provide baking with uniform temperature and long service life. The maximum baking temperature is 350℃, and the stated baking uniformity is 270℃±10℃. • Workpiece rotation is driven from the upper center, with water-cooled bearings and magnetic-fluid seals for smooth, reliable operation. • A quartz-crystal film-thickness controller enables automatic control of the coating process. • The optimized coating-control system has an attractive, practical operator interface and provides stable, reliable manual, semiautomatic and fully automatic operation.

Specifications

ParameterValue
Box size [Model: ZZS600; Common Standard Configuration]Φ600x750
Vacuum systems - limit vacuum [Model: ZZS600; Common Standard Configuration]≤3.0×10⁻⁴
Vacuum systems -- restoration of vacuum [Model: ZZS600; Common Standard Configuration; Reactivate Vacuum Series]4×10⁻³Pa ≤15min
Vacuum system -- recommended configuration [Model: ZZS600; Common Standard Configuration]Molecular and direct pumps
Vacuum system - Optional configuration [Model: ZZS600; Common Standard Configuration; Selection Original]A. Low temperature and direct-link pumps; B. proliferation and direct-link pumps
Vacuum measurement [Model: ZZS600; Common Standard Configuration; Ploting and Selection Ranges retained respectively]Atmosphere~1×10⁻⁵Pa (standard); atmosphere~1×10⁻⁷Pa (optional)
Low temperature trapper [Model: ZZS600; standard configuration commonly used; Note:*: proposed additions to the vacuum system when using molecular or proliferation pumps; process-specific when using low temperature pumps]Match
Work packages [Model: ZZS600; Common Standard Configuration]Sphere (marking); sector (select)
Baking. [Model: ZZS600; Common Standard Configuration]Baking (coding); baking (choice-making)
Project baking system [Model: ZZS600; Common Standard Configuration]Bread, pipe-like heater, maximum temperature 350°C, PID automatic temperature control and display
evaporation system - EPR source [Model: ZZS600; Common Standard Configuration; Selection]4kw/group (selection)
Vapour system - Electronic beam evaporation source - multi-clause [Model: ZZS600; common standard configuration; standard configuration; standard configuration; note ** cave capacity 12cc/club, with 20cc, 40cc options]6 dens (marked)
Vapour system - E-beam evaporation source - dentex capacity [Model: ZZS600; standard configuration commonly used; Note: **: 12cc/cave standard, 20cc or 40cc selected capacity]12cc/closure; options 20cc, 40cc
Imbrane thickness monitoring system -- Stone crystal membrane thicker [Model: ZZS600; Common Standard Configuration]Single probe (marking); six probe (selection)
Membrane thickness monitoring system -- optical membrane thickness control unit [Model: ZZS600; Common Standard Configuration; Selection; Type and Wave Original as a whole]Back-to-back, 400 ~ 1100 nm (selection)
Ion Support [Model: ZZS600; Common Standard Configuration; Selection]Hal Ion, Kaufman Ion.
Inflating system - pressure [Model: ZZS600; Common Standard Configuration; Selection]≤0.1 MPa
Inflating system - flow [Model: ZZS600; common standard configuration; optional; ≤0.1MPa]0~100sccm、0~200sccm
Energy requirements -- electricity [Model: ZZS600; common standard configuration; tri-phase five-line; note **** are calculated according to standard configuration, with confirmation of different configurations with sales staff]~25 kw
Energy requirements - cooling water temperature [Model: ZZS600; common standard configuration; note**** all calculated according to standard configuration, with different configurations confirmed with sales personnel]20°C~28°C
Energy requirements - cooling water flows [Model: ZZS600; Common Standard Configuration; 20°C ~ 28°C; Note **** all calculated according to Standard Configuration, with different configurations confirmed with sales personnel]50 L/min
Energy requirements - compressed air [Model: ZZS600; Common Standard Configuration]0.4MPa~0.8MPa
Overall Dimensions (W×H×D) [Model: ZZS600; common standard configuration; Note**** calculated according to standard configuration, with different configurations confirmed with the salesman; table unprinted without m]2100×1800×2000
Total equipment weight [Model: ZZS600; Common Standard Configuration]1500 KG

Applications

For the production of IR-CUT filters, colour filters, high reflector film, AR film, long wavelength, short wavelength and various electron film.

Datasheet

Product Datasheet
PDF
Download

Supplier Information

Ra
Rankuum
View Supplier →
Chengdu Nanguang Machinery Co., Ltd. is one of the manufacturers in China's vacuum equipment industry and special equipment for the electronics industry. Its predecessor can be traced back to the Sichuan Machinery Bureau founded in 1877. After a century of vicissitudes, the company has now developed into a high-tech enterprise dedicated to the research, development, production, and sales of vacuum equipment. The company's products mainly cover two categories: vacuum acquisition equipment represented by vacuum pumps and vacuum systems, and vacuum application equipment represented by vacuum coating machines and vacuum industrial furnaces. In 1958, the company entered the field of vacuum equipment and began to develop vacuum acquisition equipment; in 1964, the company successfully developed China's first vacuum coating machine; after more than 60 years of development, it has become one of the enterprises with a long history, complete varieties, and a comprehensive technical system in the domestic vacuum equipment field. It is also a vacuum technology solution provider with comprehensive research and development capabilities for both vacuum acquisition equipment and vacuum application equipment in China.

Request a Quote

Our team responds within 24–48 hours
ZZS box-based vacuum-plugging machine ZZS600
Rankuum · Optical Production Equipment
Direct from Manufacturer
Your inquiry will be sent directly to the manufacturer
Photonics Source Platform
We handles the inquiry on your behalf
Your information is protected and will never be shared without consent.
Contact Us

Loading...

GetExperimental Plan

Name

Phone

+86

Organization

Use Case

AI Parametric Selection
Smart Match · Precise Recs
Enter Specifications
AI Smart Matching
Get Best Matches
Skip Manual Comparison
Find Best Solutions Fast
Select Now →