Single-Sided Polishing Machine TSP-1500
The series of polishers, which are mounted on ceramic plates, are high-quality single-sided polishing equipment with a fixed crystal circle by waxing or non-axis adsorbing, which achieves double-axis and four-axis simultaneous processing, simplicity, compatibility, high stability, anti-corrosion, active voltage, high-speed pressure polishing with different projectiles and polishing fluids, and application to various semiconductor materials. Product characteristics: pressurization: air-cylinder pressure accuracy control; driver: polishing active drive; heating control: a CD-ROM temperature control system; process optimization: processable waxing & non-axarization; production capacity sufficient: 2/4 axes simultaneously; cleaning function: PAD wash-down
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Overview
Specifications
| Parameter | Value |
|---|---|
| Disk Disk Specification | OD1450 mm |
| Ceramic plate specifications | OD576 mm |
| Number of heads polished | 4 units |
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