Multi-Target Sputtering Coating Machine

Multi-Target Sputtering Coating Machine

Supplier
Hanavac
Category
Semiconductor Manufacturing Equipment
Origin
China

The multi-target sputtering coating machine is multifunctional coating equipment that consecutively performs ion cleaning, high-vacuum evacuation, metal sputtering, deposition of an oxide layer over the film, and finally thermal evaporation of an AF anti-fingerprint film.

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Overview

The multi-target sputtering coating machine is multifunctional coating equipment that consecutively performs ion cleaning, high-vacuum evacuation, metal sputtering, deposition of an oxide layer over the film, and finally thermal evaporation of an AF anti-fingerprint film.

Specifications

ParameterValue
Vacuum size [Customizable]Φ1600×2100 (customizable)
Workboard SizeΦ1400×1650
Project Drive Speed0-50 rpm
Multiple controlMetal plating + Implantation + Fingerprint protection
Splash source10 membranes plating
Ion SourceAnode Ion Source/PLASMA
High vacuum exhaust system3TMP
Low vacuum exhaust system630 mechanical pump + 1200 Rt pump
Vacuum limit3.0×10-4 Pa or less
Air exhaust time [Atmospheric pressure ~3.0 × 10-3Pa]10min (atmosphere pressure ~3.0 × 10-3Pa)
Temperature control0-300 ℃

Applications

The equipment is widely used for aluminum coating on automotive lamps, coating of automotive interior parts, computer housings and mobile phone housings. It can deposit metal films, nonconductive films, electromagnetic shielding films and other metal films.

Datasheet

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Supplier Information

Ha
Hanavac
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Shanghai HANA Technology Equipment Co., Ltd. is a high-tech enterprise established in Shanghai in 2004. The company is a professional vacuum-related equipment manufacturer that introduces advanced technologies from South Korea and Japan to produce and sell various vacuum equipment and vacuum accessories in China. HANA is a professional equipment manufacturer integrating independent research and development, design, production, electrical control, software development, process debugging, on-site installation, and after-sales management. It has its own independent R&D team and complete testing equipment. It mainly produces and manufactures magnetron sputtering coating machines, optical film coating machines (AR+AF), mobile phone-related color film coating machines, AF anti-fingerprint film coating machines, vacuum battery drying equipment, automotive headlight vacuum coating machines, automotive vehicle panel vacuum coating machines, vacuum exhaust equipment and other vacuum-related equipment. The company satisfies customers with high-quality equipment needs in China with imported equipment quality, domestic equipment prices, and excellent after-sales service.

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