Mojinano—High-Performance Maskless Lithography Equipment UV-Ultra

Mojinano—High-Performance Maskless Lithography Equipment UV-Ultra

Supplier
Mojinano
Part Number
UV-Ultra
Category
Semiconductor Manufacturing Equipment
Origin
China

UV-Ultra is a high-performance maskless lithography system for industrial applications. Ultrafast processing, internally developed algorithms, and high-performance hardware provide improved alignment, stitching, and overlay accuracy. High direct-writing speed and high resolution suit rapid, precise fabrication. Integrated design and fully automatic control simplify operation and support substrates up to12 inches. Applications include microfluidics, semiconductors, biotechnology, and microelectronics.

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Overview

UV-Ultra is a high-performance maskless lithography system for industrial applications. Ultrafast processing, internally developed algorithms, and high-performance hardware provide improved alignment, stitching, and overlay accuracy. High direct-writing speed and high resolution suit rapid, precise fabrication. Integrated design and fully automatic control simplify operation and support substrates up to12 inches. Applications include microfluidics, semiconductors, biotechnology, and microelectronics.

Applications

Microfluidics; semiconductors; biotechnology; microelectronics

Key Features

For mass production and industrial use. Processing modes from nanometer to tens-of-micrometers scales improve precision and speed. Fast, simple alignment supports 2D/2.5D micro/nanostructures. Pattern preview and alignment-error compensation. Automatic surface leveling/autofocus ensure consistency. Fully automated visual control and graphical programming improve flexible, independent adjustment. Improved alignment, stitching and overlay accuracy. Long-term stability control ensures consistent processing. Larger area accommodates different substrates, with automated vacuum fixtures. Expandable modules and rapid upgrade service. Grayscale exposure. Seamless fabrication.

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Supplier Information

Mo
Mojinano
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Moji Nano Technology is a high-tech enterprise specializing in three-dimensional micro-nano manufacturing, integrating R&D, production, sales and service of three-dimensional lithography, micro-nano 3D printing, micro-nano processing, two-photon processing, femtosecond laser processing, maskless lithography and other equipment. It is a provincial-level specialized and sophisticated enterprise. The R&D team has more than ten years of experience in ultrafast laser micro-nano 3D manufacturing, providing integrated solutions. The company has launched ultrafast laser micro-nano processing center, maskless direct writing lithography equipment, 3D micro-nano processing/nano 3D printing equipment, among which the nano-scale 3D laser direct writing lithography system achieves 50nm precision processing. Products are applied in biomedical, optical communication, new materials, micro-nano devices, aerospace and other fields.

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