Voice-Coil Fast Steering Mirror (FSM-7105.02.003.CAP)
The voice-coil fast steering mirror combines a voice-coil motor module with a flexure hinge structure and a metal housing, and provides mechanical mounting and load mounting interfaces. It can directly drive a load for small-angle adjustment, with a clamping mechanism on its moving surface to secure the load. It can also be integrated into various types of high-precision equipment to provide microradian-level motion control, optical path control, and related functions.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Standard Load | 105 mm × 96 mm × 12 mm |
| Customizable Load [Customizable ； Custom] | ≤Ф105×12mm |
| Mechanical Deflection Angle | ±4.5mrad |
| Number of Deflection Axes | 2轴 |
| Built-In Sensor | Capacitive sensor |
| Closed-Loop Resolution | 0.4μrad |
| Repeatability | 2μrad |
| Closed-Loop Bandwidth [50urad] | 100Hz@50urad |
| Linearity [Linearity After Calibration] | ≤0.1%F.S |
| Distance from Rotation Axis to Reflecting Surface [Varies with load thickness] | 24.8mm |
| Overall Dimensions | 105 mm × 100 mm × 65 mm |
| Weight [Standard Load] | ≤2.5kg (standard load) |
Datasheet
Supplier Information
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