FSM-230.02 Series Piezoelectric Fast-Steering Mirrors FSM-230.02.150.L42.SGS
The piezoelectric fast steering mirror combines PZT piezoelectric ceramic with a flexure hinge structure and a metal housing, and provides mechanical mounting and load mounting interfaces. It can directly drive a load for small-angle adjustment, with a clamping mechanism on its moving surface to secure the load. It can also be integrated into various types of high-precision equipment to provide microradian-level motion control, optical path control, and related functions.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Recommended Load | Ф25×5mm |
| Mechanical Deflection Angle | ≥±1.5mrad |
| Number of Deflection Axes | 2 轴 |
| Built-In Sensor | Strain sensor |
| Closed-Loop Resolution [The stated specifications were tested using a 16-bit controller] | ≤0.2μrad |
| Repeatability | ≤1.5μrad |
| Unloaded Resonance Frequency [±20%] | ≥2.4k（±20%） |
| Linearity [Linearity After Calibration] | ≤0.1%F.S |
| Electrostatic Capacitance [±20%] | 3μF/ Axis ±20% |
| Distance from Rotation Axis to Optical Element Mounting Surface | 6.3mm |
| Dimensions | Φ25 mm × 42 mm |
| Weight [Excluding Load] | ≤95g ( Excluding Load ) |
Datasheet
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Supplier Information
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