Piezoelectric Microdisplacement Fast-Scanning Stages (FSP-366.02) FSP-366.02.050.CAP
The name of a piezoelectric nanopositioning stage consists of three parts. "Piezoelectric" identifies the actuator type: a PZT piezoelectric ceramic stack serves as the drive source. "Nano" identifies the accuracy level: driven by the PZT piezoelectric ceramic, the moving end face can perform stepping or continuous motion with nanometer-level accuracy. "Positioning system" identifies the type of motion: one- or multidimensional translation along X, Y, and Z.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Clear Aperture Dimension | 66 mm × 66 mm |
| Mechanical Travel | ≥±50 μm |
| Number of Axes | 2轴 |
| Built-In Sensor | Capacitive sensor |
| Closed-Loop Resolution [The stated specifications were tested using a 16-bit controller] | ≤6nm |
| Unloaded Resonance Frequency [±20%] | ≥290 Hz(±20%） |
| Repeatability | ≤18nm |
| Linearity [Linearity After Calibration] | ≤0.2%F.S |
| Electrostatic Capacitance | 1.5 μF/轴 |
| Dimensions | 150 mm × 150 mm × 30 mm |
| Mass | ≤1450 g |
Datasheet
Supplier Information
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