Piezoelectric Microdisplacement Fast Scanning Stage (FSP-330.02.045.SGS)
The name of a piezoelectric nanopositioning stage consists of three parts. "Piezoelectric" identifies the actuator type: a PZT piezoelectric ceramic stack serves as the drive source. "Nano" identifies the accuracy level: driven by the PZT piezoelectric ceramic, the moving end face can perform stepping or continuous motion with nanometer-level accuracy. "Positioning system" identifies the type of motion: one- or multidimensional translation along X, Y, and Z.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Clear Aperture Dimension | Ф30mm |
| Mechanical Travel | ≥±45μm |
| Number of Axes | 2 轴 |
| Built-In Sensor | Strain sensor |
| Closed-Loop Resolution [The stated specifications were tested using a 16-bit controller] | ≤10nm |
| Unloaded Resonance Frequency [±20%] | 600Hz(±20%） |
| Repeatability | ≤60nm |
| Linearity [Linearity After Calibration] | ≤0.1%F.S |
| Electrostatic Capacitance [±20%] | 6.2μF/ Axis ±20% |
| Dimensions | 80 mm × 80 mm × 23 mm |
| Mass [Excluding Load] | ≤280g ( Excluding Load ) |
Datasheet
Supplier Information
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