Piezoelectric Focusing Mirror (FM-80.012)
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Specifications
| Parameter | Value |
|---|---|
| Optical Element | 80mm |
| Travel | ±0.6mm |
| Number of Motion Axes | Single Axis |
| Flexure Mechanism ( Guidance Type ) | Flexure Hinge |
| Resolution | 0.1μm |
| Repeatability | 0.4μm |
| Loaded Resonant Frequency | ≥500Hz |
| Speed | 0.4mm/s |
| Straightness | ≤±2.5μm |
| Minimum Single-Step Displacement | 1nm |
| Driving Force | 20N |
| Outer Dimensions [Excluding optical elements ; Including optical elements] | 143×67×65mm( Excluding optical elements ) |
| Maximum Load Mass | 700g |
Datasheet
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