FBG200 Excimer Laser
Repetition rate adjustable from 1 - 200Hz
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Overview
Specifications
| Parameter | Value |
|---|---|
| Maximum Single-Pulse Energy [ArF；193nm] | 8 mJ |
| Maximum Single-Pulse Energy [KrF；248nm] | 15 mJ |
| Maximum Single-Pulse Energy [XeCl；308nm] | 10 mJ |
| Average Power [ArF；193nm] | 1.2 W |
| Average Power [KrF；248nm] | 2.4 W |
| Average Power [XeCl；308nm] | 1.6 W |
| Maximum Repetition Rate | 200 Hz |
| Pulse Width (FWHM, ns) | ～15 |
| Energy Stability (sigma %) | 2 % |
| Spot Size (mm)(V*H) | 6 mm × 3 mm |
| Divergence (mrad)(V*H) | ～2×1 |
| Product Dimensions (mm)(L*W*H) | 712 mm × 300 mm × 520 mm |
| Weight | 60 kg |
| Power Supply Requirements | 220V, 50Hz, 5A |
| Cooling Method | Air Cooling |
| Interaction-Control System | RS232 (LCD/PC) |
| Interaction-External Trigger | Electrical Signal |
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Key Features
Datasheet
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