Metalens Optical Inspection Systems MetronLens-Phi

Metalens Optical Inspection Systems MetronLens-Phi

Supplier
Ideaoptics
Part Number
MetronLens-Phi
Category
Optical Lenses
Origin
China

The MetronLens metalens optical inspection system is dedicated to planar optical components including metalenses, metasurfaces, and microlens arrays. It combines microscopic imaging, off-axis digital holography, far-field imaging, and other advanced technologies for in-situ inspection of optical-field, phase, and far-field distributions. It reveals the physical characteristics of planar optical components and provides a powerful tool for verifying design accuracy and optimizing fabrication processes.

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Overview

The MetronLens metalens optical inspection system is dedicated to planar optical components including metalenses, metasurfaces, and microlens arrays. It combines microscopic imaging, off-axis digital holography, far-field imaging, and other advanced technologies for in-situ inspection of optical-field, phase, and far-field distributions. It reveals the physical characteristics of planar optical components and provides a powerful tool for verifying design accuracy and optimizing fabrication processes.

Specifications

ParameterValue
Measurement ModeTransmitted phase distribution, optical-field distribution, and far-field distribution detection
Measurable Optical ParametersPhase distribution, wavefront aberration, Zernike aberrations, optical-field distribution, focal length, numerical aperture, PSF, MTF, relative focusing efficiency, imaging resolution, far-field distribution
System Numerical Aperture [@ 40X]0.75 @ 40X
Field of View [@ 40X]Φ0.5mm @ 40X
Spatial Resolution [@ 40X]0.6μm @ 40X
Phase Measurement Resolution (RMS)50mrad
Phase-Measurement Wavefront Aberration0.05λ
z-Axis Scan Accuracy±1μm (0~1mm Travel ),±3μm (1~22mm Travel )
Maximum Focal Length Measurement Range5mm
Standard Light Source457nm, 532nm, 660nm continuous-wave free-space lasers
Incident Collimated Beam Divergence0.1°
Light Source Expansion Interface1 FC/APC interface, 1 free-space optical interface
Optional Module-Polarization ExpansionSupports incident / collection polarization elements, compatible with 4mm-thick polarizers

Applications

Metasurface: a planar structure of subwavelength micro/nanostructures with flexible optical-wave control, requiring measurement of optical-field and phase distributions. Microlens Array (MLA): an array of miniature lenses tens to hundreds of micrometers in size, requiring micrometer-scale inspection of individual lenses. Diffractive Optical Elements (DOE): elements based on diffraction that mainly modulate optical phase, requiring high-resolution phase measurement.

Key Features

Millisecond phase detection: MetronLens uses the invention patent for a miniature lens inspection system and method, plus off-axis heterodyne interferometry, for microscopic phase-distribution detection with resolution up to 50mrad. High spatial resolution: excellent optics, high-magnification imaging with large NA above 0.75, and a high-pixel-count detector achieve 0.6μm spatial resolution over a large field. Precision z scanning: a fully closed-loop three-axis ultrahigh-precision motorized stage scans optical fields over 0~22mm, with z positioning as fine as ±1μm. Sources: up to three CW lasers at 457nm, 532nm, and 660nm can be integrated, with external expansion for other sources.

Datasheet

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Supplier Information

Id
Ideaoptics
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Shanghai Ideaoptics Co., Ltd. is a national-level specialized and sophisticated 'Little Giant' enterprise, a deep-spectrum technology innovator. Devoted to the micro-nano optoelectronic field, it develops intelligent full-spectrum technology integrating photonics and AI, building an internationally leading deep-spectrum platform. The company provides comprehensive solutions from technology to products, including micro spectrometers, angle-resolved spectrometers, and confocal Raman spectrometers, widely applied in IC chips, optical chips, biochips, AR/VR, and advanced displays. Through joint R&D centers with universities, Ideaoptics continuously launches breakthrough products, serving over 3,000 customers and cooperating with 170+ semiconductor, advanced materials, and biomedical enterprises, aiming to advance photonic integration and empower semiconductor manufacturing.

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Metalens Optical Inspection Systems MetronLens-Phi
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