Metalens Optical Inspection Systems MetronLens
The MetronLens metalens optical inspection system is dedicated to planar optical components including metalenses, metasurfaces, and microlens arrays. It combines microscopic imaging, off-axis digital holography, far-field imaging, and other advanced technologies for in-situ inspection of optical-field, phase, and far-field distributions. It reveals the physical characteristics of planar optical components and provides a powerful tool for verifying design accuracy and optimizing fabrication processes.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Measurement Mode | Transmitted optical-field distribution detection, transmitted far-field distribution detection |
| Measurable Optical Parameters | Optical-field distribution, focal length, numerical aperture, PSF, MTF, relative focusing efficiency, imaging resolution, far-field distribution |
| System Numerical Aperture [@ 40X] | 0.75 @ 40X |
| Field of View [@ 40X；@ 5X] | Φ0.5mm @ 40X，Φ4mm @ 5X |
| Spatial Resolution [@ 40X；@ 5X] | 0.45μm @ 40X，2.35μm @ 5X |
| z-Axis Scan Accuracy | ±1μm (0~1mm Travel ),±3μm (1~22mm Travel ) |
| Maximum Focal Length Measurement Range | 5mm |
| Standard Light Source | 532nm continuous-wave fiber laser |
| Incident Collimated Beam Divergence | 0.2° |
| Light Source Expansion Interface | 1 FC/APC Interface |
| Optional Module-Polarization Expansion | Supports incident / collection polarization elements, compatible with 4mm-thick polarizers |
Applications
Key Features
Datasheet
Supplier Information
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