WPM-Series Three-Dimensional Wafer Metrology Equipment

WPM-Series Three-Dimensional Wafer Metrology Equipment

Supplier
Atometrics
Category
Research & Education
Origin
China

Three-in-one white-light interferometry, spectral reflectometry and chromatic confocal measurement. Programmable measurement supports intelligent arrays, automatic measurement, autofocus, automatic positioning and Data Feedback database management. Easy operation, automatic remeasurement, statistical analysis, additional analysis functions and one-click report generation. Lean-manufacturing modules such as statistical analysis can be developed to customer requirements.

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Overview

Three-in-one white-light interferometry, spectral reflectometry and chromatic confocal measurement. Programmable measurement supports intelligent arrays, automatic measurement, autofocus, automatic positioning and Data Feedback database management. Easy operation, automatic remeasurement, statistical analysis, additional analysis functions and one-click report generation. Lean-manufacturing modules such as statistical analysis can be developed to customer requirements.

Applications

RDL, Bump, CD, EBR, Overlay, TSV, RST and film thickness. Three-dimensional topography: wafer warp/bow/TTV/stress and CMP surface profiles. Three-dimensional dimensions: CD/RDL/EBR width. Film thickness: thickness of “zhimo” (质膜). Step height: Pilar/RDL height.

Key Features

Ultrahigh measurement accuracy, ultrahigh inspection efficiency and extensive measurement tools. Functions include roughness, film thickness, step height, critical dimensions, warpage, bow and stress. Measurement performance: topography repeatability 0.03 nm; step-height accuracy 0.3%; best XY repeatability 0.19 μm. Inspection efficiency: scanning five times faster than conventional models; fully automatic measurement with online programming; offline analysis allowing further specific analysis of raw data.

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Supplier Information

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Atometrics
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Banshi Intelligent Technology (Shenzhen) Co., Ltd., a national-level specialized and sophisticated "Little Giant" and high-tech enterprise, focuses on providing precision measuring instruments and semiconductor metrology equipment to global customers. Currently, Banshi Intelligent provides stable and reliable services to many well-known enterprises such as Huawei HiSilicon, CATL, II-VI, Accelink, Bozhon, Chinese Academy of Sciences, AT&S, Shennan Circuits, Kinwong, and Huatian Technology. With the mission of "Exploring the future of humanity with precision measurement" and the vision of "Becoming a leader in precision measurement", Banshi Intelligent will continue to innovate in the fields of precision measurement and semiconductor metrology, redefining the connotation of "Intelligent Manufacturing in China" with product technology, and contributing Banshi's strength to the rise of Chinese instruments. Atometrics · Detection with Heart A brand under Banshi Intelligent "Atometrics" has launched multiple high-precision measurement products such as white light interferometers, flash testers, ultra-depth-of-field microscopes, line laser sensors, point laser sensors, spectral confocal displacement sensors, line spectral displacement sensors, wafer 3D metrology, and packaging substrate 3D automatic inspection equipment. They have been widely used in semiconductors, aerospace, 3C electronics, 5G communications, new energy, biomedical and other fields. Providing customers with high-quality products and services is our unremitting pursuit. Our team of world's top scientists and experienced engineers is a key advantage to ensure customer success.

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WPM-Series Three-Dimensional Wafer Metrology Equipment
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