Nanometer-Level Air Bearing Platform
The air bearing linear motor platform is a nanometer-level ultra-high precision motion platform launched by Hanno. It adopts imported air bearing modules with high damping and high rigidity (air bearing stiffness up to 150N/μm). The air bearing surface is a granite surface, ensuring motion flatness and straightness. Independently developed magnetic preload design improves its stability, resists external interference, and solves the drawbacks of air bearings. The power adopts a levitated direct drive motor, with no magnetic cogging, excellent speed ripple, combined with an Invar ruler with extremely small expansion coefficient, stable
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