Air Bearing Linear-Rotary Motion Platform
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Specifications
| Parameter | Value |
|---|---|
| Effective Travel [X] | 100 mm、200 mm、300 mm、500 mm、600 mm、1000mm |
| Effective Travel [Z] | 5 mm、20 mm、30mm |
| Effective Travel [θ] | 360° |
| Positioning Accuracy [X] | ±0.5μm |
| Positioning Accuracy [Z] | 1μm |
| Positioning Accuracy [θ] | 10arc sec |
| Repeatability [X] | ±0.35μm |
| Repeatability [Z] | 1μm |
| Repeatability [θ] | 1-2arc sec |
| Straightness [X] | 2μm |
| Straightness [Z] | 10μm |
| Flatness [X] | 1μm |
| Flatness [Z] | 1μm |
| Pitch,yaw [X] | 5arc sec |
| Pitch,yaw [Z] | 5arc sec |
| Pitch,yaw [θ; Axial and Radial Runout] | 1μm (Axial and Radial Runout) |
| Operating Speed [X] | 5mm/min |
| Operating Speed [Z] | 5mm/min |
| Operating Speed [θ] | 300rpm |
| Maximum Speed [X] | 100mm/s |
| Maximum Speed [Z] | 30mm/s |
| Maximum Speed [θ] | 1000rpm |
| Load [X] | 50kg |
| Load [Z] | 30kg |
| Load [θ] | 10kg |
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Key Features
Datasheet
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Supplier Information
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