Air Bearing Three-Axis
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Specifications
| Parameter | Value |
|---|---|
| Effective Travel [X Axis] | 200mm、300mm、500mm |
| Effective Travel [Y Axis] | 200mm、300mm、500mm |
| Effective Travel [Z Axis] | 5mm、20mm、30mm |
| Maximum Load | 25kg |
| Maximum Speed at Rated Payload [X、Y、Z] | 2000mm/s、2000mm/s、75mm/s |
| Peak Acceleration at Rated Payload [X、Y] | 2G |
| Mean Time Between Failures | 40000h |
| X/Y/Z [Test Height 25 mm above the Table Surface] | ±300nm/±300nm/±500nm |
| X/Y/Z [Test Height 25 mm above the Table Surface] | ±200nm/±250nm/±350nm |
| XYZ Position Stability [Test Height 25 mm above the Table Surface] | 20nm |
| Pitch [Test Height 25 mm above the Table Surface] | 10 arc sec |
| Roll [Test Height 25 mm above the Table Surface] | 10 arc sec |
| Yaw [Test Height 25 mm above the Table Surface] | 10 arc sec |
| XY Orthogonality [Test Height 25 mm above the Table Surface] | 12 arc sec |
| Supply Voltage | 220VAC |
| Limit-switch Voltage | 5-24VDC |
| Air Filtration Rating | 0.5μm or Better |
Key Features
Datasheet
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Supplier Information
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