Planar Air Bearing Motion Platform

Planar Air Bearing Motion Platform

Supplier
Jitri-uptech
Part Number
Diamond GH
Category
Positioner
Origin
China
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Specifications

ParameterValue
Effective Travel [X]200 mm、300 mm、500 mm、600 mm、1000mm
Effective Travel [Y]200 mm、300 mm、500 mm、600 mm、1000mm
XY Positioning Accuracy [0-500mm]±0.5μm
XY Positioning Accuracy [500-1000mm]±0.75μm
XY Positioning Repeatability [0-500mm]±0.35μm
XY Positioning Repeatability [500-1000mm]±0.5μm
Position Stability [XY]±20nm
Maximum Load [X]100kg
Maximum Load [Y]100kg
Maximum Speed at Rated Payload [X]2000mm/s
Maximum Speed at Rated Payload [Y]2000mm/s
Peak Acceleration at Rated Payload [XY]2G
Pitch10 arc sec
Roll10 arc sec
Yaw10 arc sec
XY Orthogonality12 arc sec
Mean Time Between Failures40000h

Applications

Applied to wafer inspection stage worktables for wafer inspection, appearance inspection, morphology inspection, thickness inspection, etc.

Key Features

Non-contact motion characteristics; excellent speed stability; high-precision motion and control technology; precision drive and control technology to achieve high-precision positioning and high acceleration.

Datasheet

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Supplier Information

Ji
Jitri-uptech
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Jiangsu Jitri Uptech Co., Ltd. is located in Kunshan City, Jiangsu Province, and was registered in April 2019. It is an independent legal entity with state-owned equity participation. Jitri Uptech has gathered a group of industry talents in technical fields such as machinery, electrical, control, materials, and manufacturing, as well as in enterprise management, marketing, and investment and financing, forming a multi-dimensional talent system for forward-looking research, technological innovation, industrial application, and enterprise operation. It has passed ISO 9001 quality management system certification, ISO 14001 environmental management system, and ISO 45001 occupational health and safety management system. The company has a Class 10,000 cleanroom, testing room, and an ultra-precision machining workshop with vibration isolation foundation, and possesses a batch of high-precision processing and testing equipment, which can provide high-precision turning, grinding, milling, EDM, and high-precision parts testing services. Relying on its own core technology, engineering capabilities, and advanced processing and testing equipment, facing the needs of semiconductors, new displays, perovskite photovoltaics, and other fields, it focuses on the R&D, design, manufacturing, and service of high-precision air-floating linear motion axes, air-floating rotary tables, and multi-axis air-floating motion platforms. Jitri Uptech's purpose: customer demand-oriented, solving problems for customers as the goal, and creating value for customers as the purpose.

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Planar Air Bearing Motion Platform
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