lmagelR microscopic infrared imaging temperature measurement system

lmagelR microscopic infrared imaging temperature measurement system

Supplier
Ndtek
Category
Infrared Imaging
Origin
China

In the semiconductor industry, temperature is a core parameter for evaluating the performance and lifetime of power devices, analyzing device reliability, and studying failure mechanisms, and the industry's demand for "accurate, real, and efficient" temperature measurement of semiconductor devices is particularly urgent.; The ImageIR infrared microscopic imaging thermometry system launched by InfraTec is a professional solution developed based on microscopic infrared thermal imaging technology and non-contact infrared thermometry technology. Its core consists of a high-performance cooled infrared thermal imager, a highly stable motorized microscopic imaging stage system, and a feature-rich dedicated software package. Among them, the cooled infrared thermal imager combines high frame rate and high resolution, offering two detector specifications as options: 640×512 pixels (232Hz) and 1280×720 pixels (120Hz), and both support sub-frame imaging high-speed measurement mode; the acquired measurement data can be transmitted directly to a computing workstation via a 10GigE high-speed Ethernet interface with low latency and no loss. The system has a 1.5μm spatial resolution and 20mK thermal sensitivity, and can keenly detect weak temperature differences in the tiny structures of semiconductor devices, clearly and finely presenting the temperature distribution morphology of the device. The non-contact measurement method does not interfere with the actual operating conditions of the device, can faithfully restore its temperature characteristics, and fully covers the measurement requirements under steady-state and transient conditions.; The ImageIR infrared microscopic imaging thermometry system is equipped with high-quality infrared microscope objectives and close-focus macro lenses that have undergone strictly optimized design, possessing the core optical characteristics of high transmittance, low reflection, and small distortion, with a maximum pixel resolution of up to 1.5μm. If a special lens (SIL) is added, detection of even smaller-sized structures can be achieved, effectively expanding the measurement boundary. Each matching lens undergoes an individual temperature calibration process, and the calibration process is strictly traceable to the standards of the German Physikalisch-Technische Bundesanstalt (PTB), endowing the system with long-term stable high-precision thermometry performance and guaranteeing, from the source, the traceability of thermometry data and the credibility of results.; In terms of operational flexibility and measurement stability, the system integrates a professional trigger module; with a short trigger time and abundant input/output options, it supports bidirectional trigger control — the system can be triggered to work by an external signal, and the system can also generate a signal to trigger external devices, effectively ensuring high-precision synchronized data acquisition. The highly stable motorized microscopic imaging stage system can reduce vibration and achieve fast automatic precise positioning, further improving the thermometry precision of microstructures and the clarity of infrared thermal images, and the travel position of the sliding stage can be adjusted directly through the software control interface to accomplish high-precision focusing.; The ImageIR infrared microscopic imaging thermometry system comes with a developed full-process dedicated software package whose functions cover thermal imager control, stage control, thermal image data acquisition, online and offline measurement analysis, image browsing and management, and report generation. Among these, the analysis functions include temperature-time trend graphs of regions and points, line temperature trend graphs, histograms, image difference display, point-by-point or regional emissivity correction, measurement mode correction tools, and mosaicking, image sequence reconstruction, etc., providing flexible and diverse support for static or dynamic infrared image analysis.

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Overview

In the semiconductor industry, temperature is a core parameter for evaluating the performance and lifetime of power devices, analyzing device reliability, and studying failure mechanisms, and the industry's demand for "accurate, real, and efficient" temperature measurement of semiconductor devices is particularly urgent.; The ImageIR infrared microscopic imaging thermometry system launched by InfraTec is a professional solution developed based on microscopic infrared thermal imaging technology and non-contact infrared thermometry technology. Its core consists of a high-performance cooled infrared thermal imager, a highly stable motorized microscopic imaging stage system, and a feature-rich dedicated software package. Among them, the cooled infrared thermal imager combines high frame rate and high resolution, offering two detector specifications as options: 640×512 pixels (232Hz) and 1280×720 pixels (120Hz), and both support sub-frame imaging high-speed measurement mode; the acquired measurement data can be transmitted directly to a computing workstation via a 10GigE high-speed Ethernet interface with low latency and no loss. The system has a 1.5μm spatial resolution and 20mK thermal sensitivity, and can keenly detect weak temperature differences in the tiny structures of semiconductor devices, clearly and finely presenting the temperature distribution morphology of the device. The non-contact measurement method does not interfere with the actual operating conditions of the device, can faithfully restore its temperature characteristics, and fully covers the measurement requirements under steady-state and transient conditions.; The ImageIR infrared microscopic imaging thermometry system is equipped with high-quality infrared microscope objectives and close-focus macro lenses that have undergone strictly optimized design, possessing the core optical characteristics of high transmittance, low reflection, and small distortion, with a maximum pixel resolution of up to 1.5μm. If a special lens (SIL) is added, detection of even smaller-sized structures can be achieved, effectively expanding the measurement boundary. Each matching lens undergoes an individual temperature calibration process, and the calibration process is strictly traceable to the standards of the German Physikalisch-Technische Bundesanstalt (PTB), endowing the system with long-term stable high-precision thermometry performance and guaranteeing, from the source, the traceability of thermometry data and the credibility of results.; In terms of operational flexibility and measurement stability, the system integrates a professional trigger module; with a short trigger time and abundant input/output options, it supports bidirectional trigger control — the system can be triggered to work by an external signal, and the system can also generate a signal to trigger external devices, effectively ensuring high-precision synchronized data acquisition. The highly stable motorized microscopic imaging stage system can reduce vibration and achieve fast automatic precise positioning, further improving the thermometry precision of microstructures and the clarity of infrared thermal images, and the travel position of the sliding stage can be adjusted directly through the software control interface to accomplish high-precision focusing.; The ImageIR infrared microscopic imaging thermometry system comes with a developed full-process dedicated software package whose functions cover thermal imager control, stage control, thermal image data acquisition, online and offline measurement analysis, image browsing and management, and report generation. Among these, the analysis functions include temperature-time trend graphs of regions and points, line temperature trend graphs, histograms, image difference display, point-by-point or regional emissivity correction, measurement mode correction tools, and mosaicking, image sequence reconstruction, etc., providing flexible and diverse support for static or dynamic infrared image analysis.

Applications

Application scope: junction temperature of devices such as integrated circuit IC chips, 5G RF, microwave power devices, silicon carbide MOSFET, IGBT chips, and the temperature distribution of PCBA circuit boards.; Temperature measurement methods: steady-state, transient, pulsed temperature measurement

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Supplier Information

Beijing Yashi Hengyuan Technology Development Co., Ltd. was established in 2003, focusing on the R&D, production, agency and related technical services of infrared measurement systems, committed to providing customers with reliable high-performance infrared measurement products and professional application support. Products include: thermal reflection microscopic imaging temperature measurement systems, infrared microscopic imaging temperature measurement systems, semiconductor defect detection systems, multi-spectral high-temperature high-speed thermometers, infrared thermal imaging systems, infrared thermal imagers, etc. We deeply understand that providing customers with reliable product quality, excellent product performance and professional and meticulous service is the key factor for the company to win long-term customer trust and succeed in fierce competition. Independently developed and launched the ImageTR series thermal reflection imaging temperature measurement system. This is a masterpiece of the expert team after years of deep cultivation in the field of micro-nano heat conduction and device thermal behavior analysis, condensing profound technical accumulation and R&D strength. As the first commercialized domestic thermal reflection imaging temperature measurement equipment, it not only fills the domestic gap, but also opens up a new detection path for the semiconductor field with its unique technical path and high cost performance. The R&D team has both solid technical reserves and rich experience, deeply understands the core needs and actual pain points of users, so that the product is precisely tailored to the demands from the beginning of design. Its successful commercialization provides customers with a domestic preferred solution for high-performance thermal reflection imaging temperature measurement systems. The ImageTR series thermal reflection imaging temperature measurement system breaks through the bottleneck of traditional temperature measurement with innovative technology. It does not rely on the object's own infrared radiation, but captures the change of material surface reflectivity with temperature under visible light (ultraviolet) irradiation to infer accurate temperature distribution. It does not require spraying or special treatment on low-emissivity samples such as metal coatings and semiconductor wafers, avoiding sample damage and detection errors from the source. Core performance benchmarks against similar international products and has more localized advantages: 300nm ultra-high spatial resolution can accurately capture tiny heat generation areas below 0.5μm, 50ns ultra-short time response can freeze microsecond-level pulse transient heat distribution, combined with 2048×2048 pixel high-definition temperature distribution map and pixel-level calibration algorithm, achieving precise positioning of tiny hot spots, providing key data support for device thermal management optimization, reliability evaluation and failure analysis. At the same time, relying on the independent and controllable domestic mature supply chain, the delivery cycle is shortened by more than 60% compared with imported equipment. The service team provides 24-hour rapid response, efficiently solving troubleshooting and maintenance needs, significantly reducing usage costs. Its technical capabilities deeply empower the thermal design, reliability evaluation and failure analysis of advanced semiconductor devices such as GaN HEMT and FinFET, helping to shorten R&D cycles and enhance core competitiveness. Yashi Hengyuan is the general agent in China (including Hong Kong and Macao) of InfraTec GmbH Infrarotsensorik und Messtechnik, a world-renowned infrared thermal imager manufacturer in Germany, responsible for technical consulting, product demonstration, sales promotion, customer training and technical support for its infrared thermal imagers, infrared imaging systems and application solutions. In the field of infrared imaging, InfraTec is synonymous with professionalism and high standards. Since its establishment in 1991, it has always taken the R&D and manufacturing of infrared equipment and customized solutions with better performance and higher technical level as its core goal. The carefully crafted multiple series of products and solutions have won high recognition and trust from global customers. Its product line covers comprehensively and accurately adapts to multi-scenario needs, including: ImageIR series mid-wave, long-wave cooled infrared thermal imagers, VarioCAM HD series infrared thermal imagers, high-resolution microscopic infrared imaging temperature measurement systems, E-LIT semiconductor defect detection and positioning systems, Active Thermography System active excitation infrared non-destructive testing systems, PV-LIT solar cell and module defect detection systems, Thermo Check Weld automated welding quality inspection systems, Press Check hot stamping process infrared thermal imaging temperature monitoring systems, INDUSCAN steel process monitoring systems, FIRESCAN fire early prevention and detection systems, IRBIS Rotate high-speed rotating target test bench (suitable for rotating targets such as brake discs and tires), IROD safety monitoring infrared detection systems, airborne thermal imaging systems, and infrared imaging consulting and testing services. Our service team is experienced and passionate, always adhering to the "customer first" concept and providing professional support to customers. Before sales, we provide accurate technical consulting and targeted product selection services, and are equipped with a professional testing laboratory to provide free equipment demonstrations, feasibility verification and customized sample testing for customers to ensure that the selection meets actual needs; after sales, we provide timely equipment usage training, regular maintenance, rapid troubleshooting and other services to fully ensure the stable operation of customer equipment. With a complete product system and professional services, our customers cover many scientific research and industrial production fields such as microelectronics, energy production, petrochemicals, aerospace, ships, automobiles, railways, building inspection, metallurgy, industrial process optimization and quality control, composite material non-destructive testing, flame and gas measurement and analysis, land remote sensing, geotechnical research, environmental ecology research, cultural relic protection research, animal and plant research, medical research, etc. In the future, Yashi Hengyuan will adhere to customer needs as the starting point, continue independent innovation, optimize the performance and localization level of the domestic ImageTR series thermal reflection imaging temperature measurement system; at the same time, actively introduce more technologically advanced foreign products, provide more high-level products and more detailed professional services for various industries, create more value for customers and achieve win-win results.

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