HAPS-Platform-AeroStability-X stage
HAPS-Platform-AeroStability-X is a super-precision optical insulation platform that integrates the structure of a high-corecy honeycomb with the intelligent active control of the inner core.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Insulation frequency range | 0.5 Hz ~ 100 Hz【 Bandwidth 】 |
| Transient | ≤ 0.3 s【 95%】 |
| Static duplicate positioning precision | ± 0.05 um【X,Y,Z 】 |
| Slash range | ± 0.5°【 】 |
| System bandwidth | > 200 Hz【 】 |
| Noise Level at Work | < 40 dBA @ 1m【, Noise 】 |
| Category | Specification |
| Actuator Type | (AeroStability-X): ( )+ Servo ( ) |
| Sensor Configuration | High-Precision ( 1 nm)+ ( Noise 0.1 ug/√Hz) |
| Control hardware | (ARM Cortex-A72 + FPGA), 4 kHz, 250 us |
| Power requirements | AC 100-240 V, 50/60 Hz, Peak Power ≤ 600 W( 4 AS-X ) |
| Platform panel material | + /, Flatness ≤ 5 um/m^2 |
Datasheet
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Supplier Information
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