wafer substrate series
Glass wafer substrates, with materials selectable from the Quartz series, Borofloat33 and Corning series, sizes Dia 4~12 inch (100mm~300mm), thickness tolerance better than ±0.003mm, total thickness variation TTV better than ±0.5μm, warpage/bow better than 0.010mm, surface quality better than 20-10; the development direction is ultra-thinning and large-area.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Thickness Tolerance | Better Than±0.003mm |
| Total Thickness Variation (TTV) | Better Than±0.5μm |
| Warp/Bow | Better Than 0.010mm |
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