340mm Vertical Laser Plane Interferometer
This equipment uses a large-working-chamber moving testing solution, effectively solving the difficult problem of online inspection in the processing of large-aperture high-precision flats. The invisible curtain-type enclosure design enables rapid screening measurement of large-aperture working discs in mass production workshops. Equipped with a high-resolution camera and display system, it not only reduces the workload of operators but also makes the inspection process more intuitive and convenient. The simplified structure reduces manufacturing costs while ensuring measurement accuracy, providing a non-contact rapid measurement solution for low- and medium-precision manufacturers.
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Overview
Specifications
| Parameter | Value |
|---|---|
| First Reference Plane (Face A) | Working diameter D2=Φ340mm, flat surface figure deviation PV better than 0.045μm (λ/15) |
| Second Reference Plane (Face B) | Working diameter D2=Φ340mm, flat surface figure deviation PV better than 0.045μm (λ/15) |
| Collimation System | Working diameter Φ340mm; focal length f=1120mm |
| Chamber Dimensions | 1100x1100x350mm, measurable range: 1000mmx1000mm (movable) |
| Light Source Specification | Laser ZN250 (He-Ne) (632.8 nm) |
| Instrument Overall Dimensions | 1400x1250x1560mm(H) |
| Instrument Mass | 500kg |
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Datasheet
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