Direct Illumination Microscopic Inspection
The direct-illumination microscopic inspection solution is suitable for internal defect inspection of transparent or semi-transparent materials (such as LCD panels, optical films and glass substrates). The illumination path uses Kohler illumination and a high-uniformity homogenizing rod design, achieving illumination field uniformity >95% and effectively eliminating edge dark zones and hot spots. Combined with infinity-corrected objectives, internal defects such as bubbles, impurities and scratches in materials can be clearly observed. The system supports bright-field, dark-field and polarized observation modes, and an automatic scanning stage can be customized to achieve full-frame inspection of large-size samples.
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