Precision Mechanical Rotary Table

Precision Mechanical Rotary Table

Supplier
Cnbhc
Part Number
MDRS200
Category
AR/VR
Origin
China

The MDRS200 low-profile, high-precision direct drive rotary table, with its high-performance coreless torque motor and precision-tuned angular-contact sliding-friction bearing system, provides the system with control resolution up to 0.02 arc sec, positioning capability (steady-state error) better than ±0.08 arc sec and fast settling time better than 25 ms. Using directly coupled segmented coreless torque motors, it reduces periodic torque ripple and provides ultra-smooth velocity stability with excellent low-speed performance: even at extremely low speeds below 0.01°/s (36 arc sec/s), the position following error remains better than ±0.5 arc sec. Using brushless direct drive motor technology, no brush replacement or maintenance of gear trains or belts is required, providing faster acceleration and higher response speed than gear- or belt-driven mechanisms. The design is optimized for the sliding-friction bearing system and feedback system, minimizing table height and lowering the system's effective working height, reducing the Abbe errors caused by axial error and shaft runout. The MDRS series also features a standard clear aperture for beam transmission.

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Overview

The MDRS200 low-profile, high-precision direct drive rotary table, with its high-performance coreless torque motor and precision-tuned angular-contact sliding-friction bearing system, provides the system with control resolution up to 0.02 arc sec, positioning capability (steady-state error) better than ±0.08 arc sec and fast settling time better than 25 ms. Using directly coupled segmented coreless torque motors, it reduces periodic torque ripple and provides ultra-smooth velocity stability with excellent low-speed performance: even at extremely low speeds below 0.01°/s (36 arc sec/s), the position following error remains better than ±0.5 arc sec. Using brushless direct drive motor technology, no brush replacement or maintenance of gear trains or belts is required, providing faster acceleration and higher response speed than gear- or belt-driven mechanisms. The design is optimized for the sliding-friction bearing system and feedback system, minimizing table height and lowering the system's effective working height, reducing the Abbe errors caused by axial error and shaft runout. The MDRS series also features a standard clear aperture for beam transmission.

Specifications

ParameterValue
Tabletop Diameter190 mm
Aperture26 mm
Height80 mm
Accuracy (Standard)<30 arc sec (Standard)arc sec
Accuracy (Facter)<2 arc sec (Facter)arc sec
Repeatability<1 arc secnm
Axial Error Motion<2 um
Radial Error Motion<2 um
Max Speed (No Load)600 rpm
Maximum Torque (Continuous)5.99 N-m
Inertia (Unloaded)0.00843 kg-m2
Load Capacity (Axial)25 kg (Axial)
Load Capacity (Radial)15 kg (Radial)
Total Mass9.5 kg
Traceability For CalibrationISO230-2 or GB17421,往返5次,≥10Plot/360°

Key Features

Segmented coreless torque motor direct drive with zero cogging; excellent bi-directional repeatability, up to better than 0.8 arc sec (ISO230-2); positioning accuracy <2 arc sec (ISO230-2); positioning capability (steady-state error) better than ±0.08 arc sec; outstanding dynamic response, reaching ±0.08 arc sec steady state within 25 ms; brushless direct drive with no brush replacement and no maintenance of gear trains or belts; low-profile compact structure with standard clear aperture

Datasheet

Product Datasheet
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Supplier Information

<p>Sichuan Borui Huaxin Technology Co., Ltd. (CNBHC) is committed to providing ultra-precision motion control core subsystems for ultra-precision machine tools, free-form mask direct writing, lithography direct writing, wafer dicing, wafer defect inspection, ultrafast wafer microscopy, micro-nano manufacturing, high-precision packaging testing, metrology, and other fields. CNBHC adheres to international standards such as GB17421, ISO230-2, and VDI3441, striving to deliver continuous, stable, and high-quality products and services. The company upholds the mission of 'Pursue Excellent Quality, Create National Brand', insisting on basic research and inheriting the spirit of craftsmanship to advance the honor of Chinese manufacturing.</p>

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