Linear Positioning Stage
The ECO560LMS series economy direct drive stage is the latest generation of economy sub-micron direct drive stages refined through continuous optimization, offering high accuracy and an integrated sealing protection design, achieving minimum incremental motion better than 50 nm and sub-micron bi-directional repeatability at low cost. The ECO560LMS series delivers better geometric accuracy than competing products, with bi-directional repeatability <1 μm and positioning accuracy of <1.5 μm after linear error compensation. The ECO560LMS direct drive stage uses a specially customized linear motor as the drive element, which features extremely low cogging and normal attractive force, high thrust and smooth motion, combining sub-micron positioning capability with outstanding high dynamic response, making it the ideal solution for applications requiring high reliability, high performance, precision positioning and low cost. The product is available in five models with standard design travels covering 200-600 mm, speeds up to 1500 mm/s, and a complete single-axis/multi-axis cable management solution. The stage uses a long-life rolling-friction bearing system with an integrated sealing protection design to prevent contamination from entering the internal structure.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Min. Incremental Motion | 50 nm |
| Bi-Directional Repeatability | <1μm |
| Roll | 12 arc sec (Travel 200/300/400mm); 14 arc sec (Travel 500/600mm) |
| Yaw | 10 arc secarc sec |
| Maximum Force (Continuous) | 510 N |
| Maximum Speed | 1500 mm/s |
| Maximum Acceleration | 1.5 g |
| Load Capacity - Horizontal | 100 kg |
| Load Capacity - Side | 100 kg |
| Moving Mass | 23.8 kg |
| Stage Mass | 84.7 / 98.9 / 111.4 / 125.4 / 139.3 kg (Travel 200/300/400/500/600mm) |
| Traceability For Calibration | ISO230-2 or GB17421 |
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Large Optical Mounts and Precision Motion Stages_Changchun Yingjie Optoelectronic Technology Co., Ltd. Large Optical Mounts and Precision Motion Stages - Changchun Yingjie Optoelectronic Technology Co., Ltd. - Large optical mounts include: five-axis interferometer adjustment stages, five-axis lens adjustment stages, large 300mm-600mm aperture five-axis and two-axis mounts, large-aperture (1300mm) mirror mounts, etc. (manual/electric). Customized single-axis and multi-axis motion stages (including vacuum stages) with micron-level positioning accuracy, Cartesian gantry multi-axis motion systems, and open 1-12 axis multi-axis coordinated motion control systems are available according to user requirements. Large Optical Mounts and Precision Motion Stages_Changchun Yingjie Optoelectronic Technology Co., Ltd. Home Company Profile Products Technical Strength News Online Message Contact Us Join Us Home Company Profile Products Technical Strength News Online Message Contact Us Join Us Large Optical Mounts and Precision Motion Stages Large optical mounts include: five-axis interferometer adjustment stages, five-axis lens adjustment stages, large 300mm-600mm aperture five-axis and two-axis mounts, large-aperture (1300mm) mirror mounts, etc. (manual/electric). Customized single-axis and multi-axis motion stages (including vacuum stages) with micron-level positioning accuracy, Cartesian gantry multi-axis motion systems, and open 1-12 axis multi-axis coordinated motion control systems are available according to user requirements. Product Description Parameters Application: Used for supporting and adjusting the posture and position of the interferometer main unit and large-aperture optical elements in optical testing of large-aperture components. Precision motion stages are used in precision positioning, precision measurement scanning, lithography, wafer inspection, CCD imaging and 3D imaging fields. Keywords: Motion Large-Aperture Optical Precision Five-Axis Interferometer Testing Elements Imaging Scan QR code to view on mobile Parameters Previous Large-Aperture Laser Interferometer Next Optical Lens Assembly and Testing System Address: Building 12, Science and Technology Park, Beihu Science and Technology Development Zone, Changchun City, Jilin Province Tel: 18686694097 Email: info@ccyj-opticstech.com Website: http://www.ccyj-opticstech.com/ Tel: XXXXXXXXXXX Email: design@cedemo.cn Copyright: Changchun Yingjie Optoelectronic Technology Co., Ltd. Jilin ICP ***** Technical support: Zhongqi Dongli Changchun Quick Navigation Home | Company Profile | Products | Technical Strength | News | Online Message | Contact Us | Join Us Contact Us Address: Building 12, Science and Technology Park, Beihu Science and Technology Development Zone, Changchun City, Jilin Province Tel: 18686694097 Email: info@ccyj-opticstech.com Website: http://www.ccyj-opticstech.com/ Scan and follow us Copyright: Changchun Yingjie Optoelectronic Technology Co., Ltd. Jilin ICP ***** Technical support: Zhongqi Dongli Changchun
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