Linear Positioning Stage

Linear Positioning Stage

Supplier
Cnbhc
Part Number
ECO560LMS
Category
Motorized Stages
Origin
China

The ECO560LMS series economy direct drive stage is the latest generation of economy sub-micron direct drive stages refined through continuous optimization, offering high accuracy and an integrated sealing protection design, achieving minimum incremental motion better than 50 nm and sub-micron bi-directional repeatability at low cost. The ECO560LMS series delivers better geometric accuracy than competing products, with bi-directional repeatability <1 μm and positioning accuracy of <1.5 μm after linear error compensation. The ECO560LMS direct drive stage uses a specially customized linear motor as the drive element, which features extremely low cogging and normal attractive force, high thrust and smooth motion, combining sub-micron positioning capability with outstanding high dynamic response, making it the ideal solution for applications requiring high reliability, high performance, precision positioning and low cost. The product is available in five models with standard design travels covering 200-600 mm, speeds up to 1500 mm/s, and a complete single-axis/multi-axis cable management solution. The stage uses a long-life rolling-friction bearing system with an integrated sealing protection design to prevent contamination from entering the internal structure.

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Overview

The ECO560LMS series economy direct drive stage is the latest generation of economy sub-micron direct drive stages refined through continuous optimization, offering high accuracy and an integrated sealing protection design, achieving minimum incremental motion better than 50 nm and sub-micron bi-directional repeatability at low cost. The ECO560LMS series delivers better geometric accuracy than competing products, with bi-directional repeatability <1 μm and positioning accuracy of <1.5 μm after linear error compensation. The ECO560LMS direct drive stage uses a specially customized linear motor as the drive element, which features extremely low cogging and normal attractive force, high thrust and smooth motion, combining sub-micron positioning capability with outstanding high dynamic response, making it the ideal solution for applications requiring high reliability, high performance, precision positioning and low cost. The product is available in five models with standard design travels covering 200-600 mm, speeds up to 1500 mm/s, and a complete single-axis/multi-axis cable management solution. The stage uses a long-life rolling-friction bearing system with an integrated sealing protection design to prevent contamination from entering the internal structure.

Specifications

ParameterValue
Min. Incremental Motion50 nm
Bi-Directional Repeatability<1μm
Roll12 arc sec (Travel 200/300/400mm); 14 arc sec (Travel 500/600mm)
Yaw10 arc secarc sec
Maximum Force (Continuous)510 N
Maximum Speed1500 mm/s
Maximum Acceleration1.5 g
Load Capacity - Horizontal100 kg
Load Capacity - Side100 kg
Moving Mass23.8 kg
Stage Mass84.7 / 98.9 / 111.4 / 125.4 / 139.3 kg (Travel 200/300/400/500/600mm)
Traceability For CalibrationISO230-2 or GB17421

Applications

Mildly contaminated industrial applications, such as precision processing, testing and measurement in environments like low-dust laser processing, laboratory applications, and oil-free and water-mist-free conditions, as well as applications with extremely demanding cost and space requirements.

Key Features

560 mm load carriage with standard travels of 200-600 mm; bi-directional repeatability better than 1 μm; 7075 aviation-grade aluminum precision-machined by CNC; fully sealed bellows cover protection with excellent cost-effectiveness; standard modular design for flexible single-axis/multi-axis solutions. Non-contact linear motor direct drive with extremely low cogging and normal attractive force, smooth motion and high dynamic response.

Datasheet

Product Datasheet
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Supplier Information

Sichuan CNBHC Technology Co., Ltd. (CNBHC) has long been dedicated to providing ultra-precision motion control core subsystems for fields such as ultra-precision machine tools, free-form surface mask direct writing, lithography direct writing, wafer dicing, wafer defect inspection, ultrafast wafer microscopic imaging, micro-nano manufacturing, high-precision packaging and testing, and metrology and inspection. With extreme performance that distinguishes it from competitors, CNBHC continues to provide core components and system solutions for the advanced equipment industry. CNBHC always adheres to international general testing standards such as GB17421, ISO230-2, and VDI3441, striving to provide customers with continuous, stable, and high-quality products and services. CNBHC always upholds the responsibility of "pursuing excellent quality and creating a national brand", insists on basic research, inherits the spirit of craftsmanship, and forges ahead for the honor of Made in China.

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Linear Positioning Stage
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