Linear Positioning Stage
The ECO400LMS series economy direct drive stage features standard travels covering 200-600 mm. Using non-contact linear motor direct drive, it provides sub-micron positioning capability, an integrated sealing protection design and a long-life rolling-friction bearing system.
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Overview
The ECO400LMS series economy direct drive stage features standard travels covering 200-600 mm. Using non-contact linear motor direct drive, it provides sub-micron positioning capability, an integrated sealing protection design and a long-life rolling-friction bearing system.
Specifications
| Parameter | Value |
|---|---|
| Min. Incremental Motion | 50nm |
| Yaw | 10 arc secarc sec |
| Maximum Force (Continuous) | 255 N |
| Maximum Speed | 1500 mm/s |
| Maximum Acceleration | 1.5g |
| Moving Mass | 14 kg |
| Traceability For Calibration | ISO230-2 or GB17421, 5 round trips, ≥10Plot/L |
Applications
Precision processing, testing and measurement in environments such as low-dust laser processing, laboratory applications, and oil-free and water-mist-free conditions, as well as applications with extremely demanding cost and space requirements.
Key Features
400 mm load carriage with standard travels of 200-600 mm; bi-directional repeatability better than 1 μm; 7075 aviation-grade aluminum precision-machined by CNC; fully sealed bellows cover protection with excellent cost-effectiveness; standard modular design for flexible single-axis/multi-axis solutions.
Datasheet
Product Datasheet
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Supplier Information
Sichuan CNBHC Technology Co., Ltd. (CNBHC) has long been dedicated to providing ultra-precision motion control core subsystems for fields such as ultra-precision machine tools, free-form surface mask direct writing, lithography direct writing, wafer dicing, wafer defect inspection, ultrafast wafer microscopic imaging, micro-nano manufacturing, high-precision packaging and testing, and metrology and inspection.
With extreme performance that distinguishes it from competitors, CNBHC continues to provide core components and system solutions for the advanced equipment industry.
CNBHC always adheres to international general testing standards such as GB17421, ISO230-2, and VDI3441, striving to provide customers with continuous, stable, and high-quality products and services.
CNBHC always upholds the responsibility of "pursuing excellent quality and creating a national brand", insists on basic research, inherits the spirit of craftsmanship, and forges ahead for the honor of Made in China.
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