Linear Positioning Stage
The ECO280LMS series economy direct drive stage is a sub-micron direct drive stage with high accuracy and an integrated sealing protection design, delivering minimum incremental motion better than 50 nm and sub-micron bi-directional repeatability. It uses non-contact linear motor direct drive with standard design travels covering 200-600 mm.
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Overview
The ECO280LMS series economy direct drive stage is a sub-micron direct drive stage with high accuracy and an integrated sealing protection design, delivering minimum incremental motion better than 50 nm and sub-micron bi-directional repeatability. It uses non-contact linear motor direct drive with standard design travels covering 200-600 mm.
Applications
Mildly contaminated industrial applications, such as precision processing, testing and measurement in environments like low-dust laser processing, laboratory applications, and oil-free and water-mist-free conditions.
Key Features
280 mm load carriage with standard travels of 200-600 mm; bi-directional repeatability better than 1 μm; 7075 aviation-grade aluminum precision-machined by CNC; fully sealed bellows cover protection with excellent cost-effectiveness; standard modular design for flexible single-axis/multi-axis solutions.
Datasheet
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Supplier Information
<p>Sichuan Borui Huaxin Technology Co., Ltd. (CNBHC) is committed to providing ultra-precision motion control core subsystems for ultra-precision machine tools, free-form mask direct writing, lithography direct writing, wafer dicing, wafer defect inspection, ultrafast wafer microscopy, micro-nano manufacturing, high-precision packaging testing, metrology, and other fields. CNBHC adheres to international standards such as GB17421, ISO230-2, and VDI3441, striving to deliver continuous, stable, and high-quality products and services. The company upholds the mission of 'Pursue Excellent Quality, Create National Brand', insisting on basic research and inheriting the spirit of craftsmanship to advance the honor of Chinese manufacturing.</p>
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