REI165SL/SLE Linear Positioning Stage
The REI165SL/SLE sub-micron linear positioning stage combines the outstanding micro-displacement motion characteristics of crossed-roller guideways with ground screws, delivering excellent motion performance. A variety of optimized feature options give REI_SL/SLE extremely high quality, making it the ideal choice for high-performance applications.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Travel | 100 mm / 150 mm / 200 mm |
| Screw Lead | 2 mm |
| Accuracy | SL: < 1 μm |
| Accuracy | SLE: < 0.75 μm |
| Bi-Directional Repeatability | SL: < 0.75 μm |
| Bi-Directional Repeatability | SLE: < 0.5 μm |
| Straightness | 1.5 μm |
| Flatness | 2.5 μm |
| Roll | 8 arc secarc sec |
| Yaw | 6 arc secarc sec |
| Maximum Speed | 100 mm/s |
| Load Capacity (Horizontal) | 20 kg |
| Load Capacity (Side) | 15 kg |
| Load Capacity (Axial) | 10 kg |
| Traceability For Calibration | ISO230-2 or GB17421, 5 round trips, ≥10Plot/L |
Applications
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