Planar XY Nanopositioning Stage
The Planar DS-XY series is a compact, low-profile integrated XY planar motion nanopositioning stage with excellent geometric mechanical accuracy and high dynamic performance. The stage provides nanometer-level bi-directional repeatability and can be widely applied in high-end applications such as surface profile measurement, wafer dicing, lithography direct writing and laser micro/nano machining. ■ Exceptional spatial geometric accuracy The Planar DS-XY 2-axis direct drive stage offers multiple specification options for key indicators such as straightness and orthogonality error, while structural rigidity has been specially optimized to meet demanding high dynamic response requirements, with maximum acceleration up to 1.5 g and maximum speed up to 750 mm/s. This gives precision micro-machining and precision measurement equipment reliable, stable, accurate and fast positioning capability. The product runs smoothly with low velocity ripple, making it particularly suitable for scanning applications. ■ Ultra-high accuracy grade options To achieve the highest possible system accuracy (especially nanometer-level accuracy) in multi-axis positioning systems, dynamic trajectory inspection of the REI95XY stage must be performed with dedicated inspection instruments under strict environmental conditions after the mechanical system is fully assembled and functionally tested, and the inspection data dynamically calibrated through the system control software. After calibration, 2-axis motion accuracy of ±200 nm or better can be guaranteed. The performance difference between the standard and ultra-high precision versions of the Planar DS-XY is mainly reflected in orthogonality error. The calibrated ultra-high precision version can partially correct and eliminate accuracy errors caused by straightness, orthogonality error, yaw error, etc., but this does not mean the original physical mechanical accuracy has been changed. ■ Non-contact direct drive The Planar DS-XY 2-axis stage features high dynamic performance, zero cogging, sub-nanometer resolution, extremely low velocity ripple, and high-speed, high-accuracy characteristics. The Planar DS-200XY and Planar DS-300XY support single or dual motor configurations for each axis, providing more choices for a variety of different loads. Whether single or dual motors are used, the thrust and friction forces generated are maintained at the geometric center of the stage, a design that ensures stage performance. ■ Integrated cable management The Planar DS-XY 2-axis stage features a cable management system specially designed for long service life and optimized performance, allowing rapid combination with other stages. The special cable management solution can also provide additional air line routing without affecting stage performance.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Orthogonality | EC:20 arc sec;Base:15 arc sec;Plus:10 arc sec;UHP:5 arc secarc sec |
| Traceability For Calibration | ISO230-2 or GB17421,往返5次,≥10Plot/L |
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Datasheet
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