Coating Cavity Series AluVac
AluVac Coating, Semiconductor, Device Material
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Overview
Specifications
| Parameter | Value |
|---|---|
| Coating | Coating |
| Cavity | 方形, 前后开门, 可配合手套箱安装 |
| Material | 优质真空stainless steel |
| Dimensions | L260W262H351 |
| MagicVol/ | PC |
| Dimensions | ≤30×30mm |
| Power | ≥5KW |
| Dimensions | L360W363H486 |
| Power | ≥8KW |
| Dimensions | L460W464H635 |
| Power | ≥10KW |
| Current | 0~200A CW |
| Heating temperature | Maximum 600℃ |
| Number of evaporation sources | 2~8 optional; fan-shaped distribution, isolated by baffles to avoid cross contamination |
| Evaporation source heating temperature | Room temperature~600°C |
| Evaporation source parameters | Metal boat: 200A |
| substrate table | φ161mm |
| Sample holder and mask | Sample holder area: 70×70mm, can place samples up to 65×65mm |
| Substrate stage baffle | Programmable control, cylinder + magnetic fluid drive, stable transmission, reliable sealing |
| Lifting and lowering of substrate table | Fixed spacing or 0~30mm adjustable |
| Film thickness non-uniformity | ≤5% |
| Alternate interface | 4 |
| Door panel control | Manual/automatic/manual-automatic integration |
| System control | PC software |
| Pumping rate | 5.0×10^-2Pa≤5min |
| working vacuum | Better than 5×10^-4Pa, the time from atmosphere to working vacuum is ≤30 minutes |
| ultimate vacuum | Better than 4.0×10^-5Pa |
| Leak rate | ≤6.5×10^-8Pa·L/S |
| Molecular pump category | Oil/grease lubrication and magnetic levitation optional |
| Circulating water parameters | ≤4LMP, temperature range -5°C~45°C, temperature control accuracy 0.1% |
| Vacuum system | Molecular pump + mechanical pump PC software control |
| Vacuum maintenance | 12 hours≤2Pa |
| Glove box parameters | Glove box contains water and oxygen probe, gas circulation and regeneration system. Water oxygen content is controlled to less than 1 ppm |
| System protection | Air pressure and high pressure protection control system provide real-time alarm throughout the process |
| Air circuit control | Ultra high vacuum pneumatic solenoid valve |
| Electrical cabinet | Integrated with the system to save space |
| Chamber temperature measurement | Optional high-precision PT100 temperature measurement, the software displays the temperature value in real time |
| Vacuum gauge display range | 1.0×10^5Pa to 1.0×10^-5Pa |
| frame | Assembled with imported aluminum profiles, overall simple and elegant |
| Number of evaporation sources | 6~12 optional; fan-shaped distribution, isolated by baffles to avoid cross contamination |
| substrate table | φ224mm |
| Sample holder and mask | Sample holder area: 100×100mm, can place samples up to 90×90mm |
| Lifting and lowering of substrate table | Fixed spacing or 0~50mm adjustable |
| Alternate interface | 6 |
| Pumping rate | 5.0×10^-2Pa≤8min |
| Evaporation power supply | Control mode: constant current mode; Quantity: according to customer requirements; Power: 600W, 1200W; Accuracy: Program control accuracy is 0.01% of the range |
| Number of evaporation sources | 10~16 optional; fan-shaped distribution, isolated by baffles to avoid cross contamination |
| substrate table | φ287mm |
| Sample holder and mask | Sample holder area: 140×140mm, can hold up to 134×134mm samples or 16 pieces of 25×25mm samples |
| Lifting and lowering of substrate table | Fixed spacing or 0~70mm adjustable |
| Pumping rate | 5.0×10^-2Pa≤10min |
| Number of evaporation sources | 2~16 groups optional |
| Evaporation power module | 1~10 groups optional, power 600W, 1200W, 1500W optional |
| ultimate vacuum | Better than 410^-5Pa |
| Distance between sample and evaporation source | Fixed or 0~70mm adjustable |
| Tungsten boat baffle | Standard configuration according to evaporation source, 2~16 groups |
| Air pressure protection | Imported pressure switch, positive and negative pressure can be set, effectively protecting the vacuum environment |
| Pumping rate | Normal pressure to 510^-2Pa≤10min |
| mask library | 4-bit/6-bit/8-bit optional |
| Vacuum maintenance | 12 hours after stopping the vacuum system ≤ 2 Pa |
| Door panel control | Manual, manual automatic integration optional |
Applications
Datasheet
Supplier Information
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