Coating Cavity Series SteeVac
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Specifications
| Parameter | Value |
|---|---|
| Coating | Coating |
| Cavity | 方形, 前后开门, 可配合手套箱安装 |
| Material | 优质真空stainless steel |
| Dimensions | L260W262H351 |
| Dimensions | ≤30×30mm |
| Power | ≥5KW |
| Dimensions | L360W363H486 |
| Power | ≥8KW |
| Coating | Coating |
| Dimensions | L460W464H635 |
| Power | ≥10KW |
| Electrode distribution | Fan-shaped distribution, isolated by baffles to avoid cross contamination |
| Number of cryogenic sources | Up to 6 evaporation sources |
| Low temperature source temperature range | Room temperature~600°C |
| Low temperature source switching | PC control/manual |
| Number of high temperature sources | 1~3 optional |
| Substrate table plan one | φ161mm, round |
| Substrate table plan two | 8080mm, square |
| Substrate stage heating | Normal temperature/heating, heating can be equipped with room temperature~400℃ or room temperature~200℃ temperature control range |
| Substrate table height | Distance between sample holder and source surface: ≤330mm; loading method: side insertion method |
| Sample holder and mask | 70×70mm, can place samples up to 65×65mm |
| Substrate stage baffle | Programmable control, cylinder + magnetic fluid drive, stable transmission, reliable sealing |
| Lifting and lowering of substrate table | Fixed spacing or 0~30mm adjustable |
| Film thickness non-uniformity | ≤5% |
| Alternate interface | 4 |
| Door panel control | Manual/automatic/manual-automatic |
| System control | PC software; automatic speed control, power control, temperature control |
| Pumping rate | 5.0×10-2Pa≤5min |
| ultimate vacuum | Better than 4.0×10-5Pa |
| Leak rate | ≤6.5×10-8Pa·L/S |
| working vacuum | ≥5×10-4Pa, time from atmosphere to working vacuum ≤30min |
| System pressure holding | After the system is pumped to the limit, and 12 hours after the pump is shut down, the system vacuum remains ≤2Pa |
| Molecular pump category | Oil/grease lubrication and magnetic levitation optional |
| Circulating water parameters | ≤4LMP, temperature range -5°C~45°C, temperature control accuracy 0.1% |
| Vacuum system | Molecular pump + mechanical pump, PC software control |
| Evaporation power supply | Control mode: constant current mode; Quantity: according to customer requirements; Power: 600W, 1200W, 1500W optional; Accuracy: Program control accuracy is 0.01% of the range |
| Vacuum maintenance | 12 hours≤2Pa |
| System protection | Air pressure, high pressure protection, real-time alarm throughout the control system |
| Air circuit control | Ultra high vacuum pneumatic solenoid valve |
| Electrical cabinet | Integrated with the system to save space |
| Chamber temperature measurement | Optional high-precision PT100 temperature measurement, the software displays the temperature value in real time |
| Vacuum gauge display range | 1.0×105Pa~1.0×10-5Pa |
| frame | Assembled with imported aluminum profiles, overall simple and elegant |
| Number of cryogenic sources | Up to 9 evaporation sources |
| Number of high temperature sources | 1~4 optional |
| Substrate table plan one | φ224mm, round |
| Substrate table plan two | 110110mm, square |
| Sample holder and mask | 100×100mm, can place samples up to 90×90mm |
| Lifting and lowering of substrate table | Fixed spacing or 0~50mm adjustable |
| Alternate interface | 6 |
| Pumping rate | 5.0×10-2Pa≤8min |
| Number of cryogenic sources | Up to 13 evaporation sources |
| Number of high temperature sources | 1~6 optional |
| Substrate table plan one | φ287mm, round |
| Substrate table plan two | 150150mm, square |
| Sample holder and mask | Maximum 134×134mm sample or 16 pieces of 25×25mm sample |
| Lifting and lowering of substrate table | Fixed spacing or 0~70mm adjustable |
| Pumping rate | 5×10-2Pa≤10min |
Datasheet
Supplier Information
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