PRA & WRA Residual Gas Analyzers (RGA)

PRA & WRA Residual Gas Analyzers (RGA)

Supplier
EdwardsVacuum
Part Number
PRA & WRA Residual Gas Analyzers (RGA)
Category
Gas Analysis
Origin
United Kingdom

Edwards PRA and WRA RGAs provide high-performance residual gas analysis for vacuum systems, offering simple operation and advanced features for precise measurements.

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Overview

Edwards PRA and WRA RGAs provide high-performance residual gas analysis for vacuum systems, offering simple operation and advanced features for precise measurements.

Specifications

ParameterValue
Mass Range (amu) PRA1001-100
Mass Range (amu) PRA100S1-100
Mass Range (amu) PRA2001-200
Mass Range (amu) PRA200S1-200
Mass Range (amu) WRA200S1-200
Mass Range (amu) WRA300S1-300
Mass Filter Type PRAQMS
Mass Filter Type WRAQMS
Detector Type PRA100Faraday cup
Detector Type PRA100SEM/Faraday cup
Detector Type PRA200Faraday cup
Detector Type PRA200SEM/Faraday cup
Detector Type WRA200SEM/Faraday cup
Detector Type WRA300SEM/Faraday cup
Sensitivity (A/mbar) PRA1001x10⁻¹⁶
Sensitivity (A/mbar) PRA100S400/1x10⁻¹⁶
Sensitivity (A/mbar) PRA2001x10⁻¹⁶
Sensitivity (A/mbar) PRA200S400/1x10⁻¹⁶
Sensitivity (A/mbar) WRA200S400/2.5x10⁻¹⁰
Sensitivity (A/mbar) WRA300S400/2.5x10⁻¹⁰
Minimum Detectable Partial Pressure (mbar) PRA1001x10⁻¹⁴
Minimum Detectable Partial Pressure (mbar) PRA100S1x10⁻¹⁴
Minimum Detectable Partial Pressure (mbar) PRA2001x10⁻¹⁴
Minimum Detectable Partial Pressure (mbar) PRA200S1x10⁻¹⁴
Minimum Detectable Partial Pressure (mbar) WRA200S1x10⁻¹¹
Minimum Detectable Partial Pressure (mbar) WRA300S1x10⁻¹¹
Max Operating Pressure (mbar) PRA1x10⁻⁴
Max Operating Pressure (mbar) WRA1x10⁻⁴
Filament Material PRAIr/Y₂O₃
Filament Material WRAIr/Y₂O₃
Operating Temperature (°C) PRA40
Operating Temperature (°C) WRA40
Max Backing Temperature with Electronics (°C) PRA120
Max Backing Temperature with Electronics (°C) WRA250
Max Backing Temperature without Electronics (°C) PRA150
Max Backing Temperature without Electronics (°C) WRA300
Connection Flange PRADN40CF
Connection Flange WRADN40CF
Power Input PRADC24V±10% 50W
Power Input WRADC24V±10% 50W
Weight (kg) PRA2.6-2.84
Weight (kg) WRA3.21
IP PRA30
IP WRA30
Communication PRAEthernet
Communication WRAEthernet

Applications

1. Residual gas analysis in high vacuum pumping equipment 2. Gas analysis in R&D 3. Gas analysis in freeze drying 4. Gas analysis in PV/FPD/Semi 5. Residual gas analysis in UHV pumping equipment 6. Analysis of organic materials 7. Environmental tracking 8. Gas impurity

Key Features

1. Total pressure measurement 2. Dual filament 3. On unit display 4. Customer replaceable parts 5. Degas function 6. Protection of ion source and EM

Datasheet

Product Datasheet
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Supplier Information

Ed
EdwardsVacuum
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<p>Edwards is a global partner in vacuum and exhaust gas treatment solutions. As an industry leader, we continuously push the boundaries of technology to deliver innovative products that are essential to daily life, while working hand in hand with customers to set new industry benchmarks. Edwards is committed to minimizing the adverse environmental impact of semiconductor manufacturing and reducing its impact on the current and future natural environment. With over 100 years of history, Edwards is an ideal partner for thousands of critical applications worldwide, from power generation to steel production, and from challenging space simulation and high-energy physics research environments. Wherever vacuum is needed, Edwards' exceptional advantages are found. From pharmaceuticals to mobile phones, computers to coffee beans, automobiles to chemicals, we take pride in changing people's lives. We act responsibly to ensure sustainable innovation while helping customers maintain competitive advantage and operational excellence. Edwards is a subsidiary of the Atlas Copco Group (NASDAQ OMX Stockholm: ATCO A, ATCO B), a Swedish industrial productivity solutions provider.</p>

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