PRA & WRA Residual Gas Analyzers (RGA)
Edwards PRA and WRA RGAs provide high-performance residual gas analysis for vacuum systems, offering simple operation and advanced features for precise measurements.
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Overview
Edwards PRA and WRA RGAs provide high-performance residual gas analysis for vacuum systems, offering simple operation and advanced features for precise measurements.
Specifications
| Parameter | Value |
|---|---|
| Mass Range (amu) PRA100 | 1-100 |
| Mass Range (amu) PRA100S | 1-100 |
| Mass Range (amu) PRA200 | 1-200 |
| Mass Range (amu) PRA200S | 1-200 |
| Mass Range (amu) WRA200S | 1-200 |
| Mass Range (amu) WRA300S | 1-300 |
| Mass Filter Type PRA | QMS |
| Mass Filter Type WRA | QMS |
| Detector Type PRA100 | Faraday cup |
| Detector Type PRA100S | EM/Faraday cup |
| Detector Type PRA200 | Faraday cup |
| Detector Type PRA200S | EM/Faraday cup |
| Detector Type WRA200S | EM/Faraday cup |
| Detector Type WRA300S | EM/Faraday cup |
| Sensitivity (A/mbar) PRA100 | 1x10⁻¹⁶ |
| Sensitivity (A/mbar) PRA100S | 400/1x10⁻¹⁶ |
| Sensitivity (A/mbar) PRA200 | 1x10⁻¹⁶ |
| Sensitivity (A/mbar) PRA200S | 400/1x10⁻¹⁶ |
| Sensitivity (A/mbar) WRA200S | 400/2.5x10⁻¹⁰ |
| Sensitivity (A/mbar) WRA300S | 400/2.5x10⁻¹⁰ |
| Minimum Detectable Partial Pressure (mbar) PRA100 | 1x10⁻¹⁴ |
| Minimum Detectable Partial Pressure (mbar) PRA100S | 1x10⁻¹⁴ |
| Minimum Detectable Partial Pressure (mbar) PRA200 | 1x10⁻¹⁴ |
| Minimum Detectable Partial Pressure (mbar) PRA200S | 1x10⁻¹⁴ |
| Minimum Detectable Partial Pressure (mbar) WRA200S | 1x10⁻¹¹ |
| Minimum Detectable Partial Pressure (mbar) WRA300S | 1x10⁻¹¹ |
| Max Operating Pressure (mbar) PRA | 1x10⁻⁴ |
| Max Operating Pressure (mbar) WRA | 1x10⁻⁴ |
| Filament Material PRA | Ir/Y₂O₃ |
| Filament Material WRA | Ir/Y₂O₃ |
| Operating Temperature (°C) PRA | 40 |
| Operating Temperature (°C) WRA | 40 |
| Max Backing Temperature with Electronics (°C) PRA | 120 |
| Max Backing Temperature with Electronics (°C) WRA | 250 |
| Max Backing Temperature without Electronics (°C) PRA | 150 |
| Max Backing Temperature without Electronics (°C) WRA | 300 |
| Connection Flange PRA | DN40CF |
| Connection Flange WRA | DN40CF |
| Power Input PRA | DC24V±10% 50W |
| Power Input WRA | DC24V±10% 50W |
| Weight (kg) PRA | 2.6-2.84 |
| Weight (kg) WRA | 3.21 |
| IP PRA | 30 |
| IP WRA | 30 |
| Communication PRA | Ethernet |
| Communication WRA | Ethernet |
Applications
1. Residual gas analysis in high vacuum pumping equipment 2. Gas analysis in R&D 3. Gas analysis in freeze drying 4. Gas analysis in PV/FPD/Semi 5. Residual gas analysis in UHV pumping equipment 6. Analysis of organic materials 7. Environmental tracking 8. Gas impurity
Key Features
1. Total pressure measurement 2. Dual filament 3. On unit display 4. Customer replaceable parts 5. Degas function 6. Protection of ion source and EM
Datasheet
Product Datasheet
PDF
Supplier Information
<p>Edwards is a global partner in vacuum and exhaust gas treatment solutions. As an industry leader, we continuously push the boundaries of technology to deliver innovative products that are essential to daily life, while working hand in hand with customers to set new industry benchmarks. Edwards is committed to minimizing the adverse environmental impact of semiconductor manufacturing and reducing its impact on the current and future natural environment. With over 100 years of history, Edwards is an ideal partner for thousands of critical applications worldwide, from power generation to steel production, and from challenging space simulation and high-energy physics research environments. Wherever vacuum is needed, Edwards' exceptional advantages are found. From pharmaceuticals to mobile phones, computers to coffee beans, automobiles to chemicals, we take pride in changing people's lives. We act responsibly to ensure sustainable innovation while helping customers maintain competitive advantage and operational excellence. Edwards is a subsidiary of the Atlas Copco Group (NASDAQ OMX Stockholm: ATCO A, ATCO B), a Swedish industrial productivity solutions provider.</p>
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