Automatic Throughput Calculation and Quality Assurance System
A comprehensive system designed to enhance smart manufacturing capabilities in semiconductor fabs by automating throughput calculation and ensuring data quality.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Data Storage Architecture | Relational Database Management System (RDBMS) |
| Data Set Size | ≥10^4 entries |
| Computational Power | 16 cores server |
| Data Window | 1 week |
| Unit Interval Time | Variable |
| Unit Interval Time | calculated from tool events |
| First Unit Time | Variable |
| First Unit Time | calculated from tool events |
| Minutes per Unit (MPU) | Variable |
| Minutes per Unit (MPU) | calculated from total processing time and number of units |
| Wafers per Hour (WPH) | 1/MPU x 60 minutes |
| Coefficient of Variation (CV) | <0.1 for top processes |
| Data Compression Ratio | High |
| Supported Tool Types | Single wafer tools, batch tools, multi-chamber tools |
| Supported Event Types | Process start |
| Supported Event Types | process end |
| Supported Event Types | track in |
| Supported Event Types | track out |
| Supported Calculation Logic | Automatic calculation using time-stamped events |
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