UL6000 Fab PLUS
The UL6000 Fab PLUS is a high-performance leak detection system designed for industrial applications, offering precision, robustness, and reliability to minimize downtime and maximize productivity.
Specification Snapshot
Response Time
1.4s
Rate-of-Rise Measurement Time (I-RISE)
<10s
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Overview
The UL6000 Fab PLUS is a high-performance leak detection system designed for industrial applications, offering precision, robustness, and reliability to minimize downtime and maximize productivity.
Specifications
| Parameter | Value |
|---|---|
| Minimum Detectable Helium Leak Rate (Vacuum Mode) | <5×10⁻¹²mbar·L/s |
| Minimum Detectable Helium Leak Rate (Sniffer Mode) | <5×10⁻⁶mbar·L/s |
| Maximum Inlet Pressure (MASSIVE Mode) | atm.(~1013mbar) |
| Forepump Type | Roots |
| Maximum Air Pumping Speed (Forepump) | 36m³/h |
| Air Pumping Speed at Inlet Flange (100-1000mbar) | 23m³/h |
| Air Pumping Speed at Inlet Flange (10-100mbar) | 26m³/h |
| Air Pumping Speed at Inlet Flange (1-10mbar) | 26m³/h |
| Maximum Helium Pumping Speed (ULTRA Mode) | 36L/s |
| Helium Pumping Speed (DN63 and DN40) | ~30L/s |
| Response Time | 1.4s |
| Evacuation Time (50L, 1mbar) | 52s |
| Evacuation Time (500L, 1mbar) | 104s |
| Evacuation Time (1000L, 1mbar) | 527s |
| Ventilation Time (50L) | 16s |
| Startup Time | <2min |
| Calibration Time | <30s |
| Rate-of-Rise Measurement Time (I-RISE) | <10s |
| Inlet Flange | DN63 ISO-K |
| Detectable Masses | 2, 3, 4 (H₂, ³He, He) |
| Power Supply Voltage | 100-230V 50/60Hz |
| Maximum Power | 1500VA |
| Typical Power Requirement | 700VA |
| Dimensions (L×W×H) | 1050×472×1040mm |
| Weight | 144kg |
Applications
1. Semiconductor manufacturing 2. Flat panel display production 3. Solar cell manufacturing 4. Aerospace components and systems
Key Features
1. Innovative booster pump for faster response and helium removal 2. Robust vacuum system with shock-resistant design 3. Exclusive INFICON technologies like I-CAL, I-ZERO 2.0, and I-RISE 4. Massive mode for detecting large leaks 5. HYDRO-S technology for eliminating water signal interference
Datasheet
Product Datasheet
PDF
Supplier Information
<p>INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process-control software that enhance productivity and quality in vacuum-based manufacturing. Its analysis, measurement and control products are widely used in semiconductors, thin-film coating, flat-panel displays, solar cells, automotive and refrigeration leak detection, life sciences and more. Headquartered in Switzerland (listed on SIX as IFCN), INFICON established its China operation (a wholly owned subsidiary) with a Shanghai manufacturing plant in 2006 and sales offices in Beijing, Shanghai, Guangzhou and Hong Kong.</p>
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