UL6000 Fab PLUS

UL6000 Fab PLUS

Supplier
Inficon
Part Number
UL6000 Fab PLUS
Category
Other
Origin
China

The UL6000 Fab PLUS is a high-performance leak detection system designed for industrial applications, offering precision, robustness, and reliability to minimize downtime and maximize productivity.

Specification Snapshot
Response Time
1.4s
Rate-of-Rise Measurement Time (I-RISE)
<10s
Request a Quote Download Datasheet Chat
Save to Favorites Save to Favorites

Overview

The UL6000 Fab PLUS is a high-performance leak detection system designed for industrial applications, offering precision, robustness, and reliability to minimize downtime and maximize productivity.

Specifications

ParameterValue
Minimum Detectable Helium Leak Rate (Vacuum Mode)<5×10⁻¹²mbar·L/s
Minimum Detectable Helium Leak Rate (Sniffer Mode)<5×10⁻⁶mbar·L/s
Maximum Inlet Pressure (MASSIVE Mode)atm.(~1013mbar)
Forepump TypeRoots
Maximum Air Pumping Speed (Forepump)36m³/h
Air Pumping Speed at Inlet Flange (100-1000mbar)23m³/h
Air Pumping Speed at Inlet Flange (10-100mbar)26m³/h
Air Pumping Speed at Inlet Flange (1-10mbar)26m³/h
Maximum Helium Pumping Speed (ULTRA Mode)36L/s
Helium Pumping Speed (DN63 and DN40)~30L/s
Response Time1.4s
Evacuation Time (50L, 1mbar)52s
Evacuation Time (500L, 1mbar)104s
Evacuation Time (1000L, 1mbar)527s
Ventilation Time (50L)16s
Startup Time<2min
Calibration Time<30s
Rate-of-Rise Measurement Time (I-RISE)<10s
Inlet FlangeDN63 ISO-K
Detectable Masses2, 3, 4 (H₂, ³He, He)
Power Supply Voltage100-230V 50/60Hz
Maximum Power1500VA
Typical Power Requirement700VA
Dimensions (L×W×H)1050×472×1040mm
Weight144kg

Applications

1. Semiconductor manufacturing 2. Flat panel display production 3. Solar cell manufacturing 4. Aerospace components and systems

Key Features

1. Innovative booster pump for faster response and helium removal 2. Robust vacuum system with shock-resistant design 3. Exclusive INFICON technologies like I-CAL, I-ZERO 2.0, and I-RISE 4. Massive mode for detecting large leaks 5. HYDRO-S technology for eliminating water signal interference

Datasheet

Product Datasheet
PDF
Download

Supplier Information

In
Inficon
View Supplier →
<p>INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process-control software that enhance productivity and quality in vacuum-based manufacturing. Its analysis, measurement and control products are widely used in semiconductors, thin-film coating, flat-panel displays, solar cells, automotive and refrigeration leak detection, life sciences and more. Headquartered in Switzerland (listed on SIX as IFCN), INFICON established its China operation (a wholly owned subsidiary) with a Shanghai manufacturing plant in 2006 and sales offices in Beijing, Shanghai, Guangzhou and Hong Kong.</p>

Request a Quote

Our team responds within 24–48 hours
UL6000 Fab PLUS
Inficon · Other
Direct from Manufacturer
Your inquiry will be sent directly to the manufacturer
Photonics Source Platform
We handles the inquiry on your behalf
Your information is protected and will never be shared without consent.
Contact Us

Loading...

GetExperimental Plan

Name

Phone

+86

Organization

Use Case

AI Parametric Selection
Smart Match · Precise Recs
Enter Specifications
AI Smart Matching
Get Best Matches
Skip Manual Comparison
Find Best Solutions Fast
Select Now →