UL3000 Fab ULTRA
The UL3000 Fab ULTRA is a mobile helium leak detector designed for high-performance and user-friendly leak testing in semiconductor and display manufacturing. It offers advanced features such as ULTRATEST sensor technology, I-CAL software for fast measurements, and I-ZERO 2.0 for efficient leak checking.
Specification Snapshot
Response Time
<1s
Dimensions (L×W×H)
1050×472×987mm (42×21×34in.)
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Overview
The UL3000 Fab ULTRA is a mobile helium leak detector designed for high-performance and user-friendly leak testing in semiconductor and display manufacturing. It offers advanced features such as ULTRATEST sensor technology, I-CAL software for fast measurements, and I-ZERO 2.0 for efficient leak checking.
Specifications
| Parameter | Value |
|---|---|
| Min. detectable leak rate for helium (vacuum method) | <5×10^-12mbar l/s |
| Min. detectable leak rate for helium (sniffer mode) | <5×10^-9mbar l/s |
| Max. inlet pressure (MASSIVE mode) | 1000mbar |
| Pumping speed during evacuation | >36m³/h |
| Helium pumping speed (high sensitive mode ULTRA) | 4l/s |
| Response Time | <1s |
| Time until ready for operation | <3min |
| Detectable masses (ULTRATEST Sensor Technology) | 2, 3, 4 (H2, 3He, He) |
| Ion Source | 2 filaments, iridium/yttria oxide coated |
| Test Port | DN 25 KF |
| Adjustable triggers | 4 |
| Interface | 2×USB, Ethernet/LAN |
| Supply Voltage | 100 to 240V 50/60Hz (AC) |
| Power Consumption | typ. 700VA, max. 1500VA |
| Dimensions (L×W×H) | 1050×472×987mm (42×21×34in.) |
| Weight | 132kg |
| Permissable ambient temperature range (during operation) | 10 to 40°C |
| Additional Features | HYDRO-S, separate sniffer line SL3000 port |
Applications
1. Semiconductor manufacturing 2. Display tools 3. Vacuum lines and pumps in sub fab 4. Gas cabinets and complex gas delivery lines 5. Fab facilities and abatement 6. Various process tools like Etch, CVD, PVD, Furnace, Implant, MOCVD, Solar, FPD
Key Features
1. Equipped with ULTRATEST sensor technology for high sensitivity 2. I-CAL software for fast and accurate measurements 3. I-ZERO 2.0 for efficient background suppression 4. Intuitive touch display with rotatable high-resolution screen 5. Remote control via Wi-Fi and USB data export 6. Low maintenance with a robust vacuum system and 3-year warranty 7. Compact and mobile design for easy handling
Datasheet
Product Datasheet
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Supplier Information
<p>INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process-control software that enhance productivity and quality in vacuum-based manufacturing. Its analysis, measurement and control products are widely used in semiconductors, thin-film coating, flat-panel displays, solar cells, automotive and refrigeration leak detection, life sciences and more. Headquartered in Switzerland (listed on SIX as IFCN), INFICON established its China operation (a wholly owned subsidiary) with a Shanghai manufacturing plant in 2006 and sales offices in Beijing, Shanghai, Guangzhou and Hong Kong.</p>
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