Spot™ CDS530D
The Spot™ CDS530D is a ceramic capacitance diaphragm sensor designed for integration into limited spaces in vacuum instruments and systems. It offers high accuracy over a wide measurement range, with alumina ceramic cells and stainless steel feedthroughs for durability. The sensor features a digital SPI interface for easy integration, fast response time, excellent repeatability, and long-term stability.
Specification Snapshot
Power Consumption
<0.05W operation
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Overview
The Spot™ CDS530D is a ceramic capacitance diaphragm sensor designed for integration into limited spaces in vacuum instruments and systems. It offers high accuracy over a wide measurement range, with alumina ceramic cells and stainless steel feedthroughs for durability. The sensor features a digital SPI interface for easy integration, fast response time, excellent repeatability, and long-term stability.
Specifications
| Parameter | Value |
|---|---|
| Full scale (FS) 1000 Torr | 0.5% of reading |
| Full scale (FS) 300 Torr | 0.5% of reading |
| Full scale (FS) 100 Torr | 0.5% of reading |
| Full scale (FS) 30 Torr | 0.5% of reading |
| Full scale (FS) 10 Torr | 0.5% of reading |
| Temperature effect on zero | 0.01%FS/°C |
| Temperature Effect on Span | 0.01% of reading/°C |
| Resolution | 0.01%FS/°C |
| Long time stability | 0.5%FS/year |
| Lowest reading | 0.05%FS |
| Measuring range | 0.1...100%FS |
| Compensated range | 10...50°C |
| Storage temperature | -20...80°C |
| Ambient humidity limits | <80%RH non-condensing |
| Maximum admissible pressure | 400kPa absolute |
| Burst pressure | 800kPa absolute |
| Supply Voltage | 5±0.25VDC |
| Supply voltage ripple | ≤50mVpp |
| Power Consumption | <0.05W operation |
| Digital Interface | SPI bus |
| Data Rate | 1, 2.5, 5, 10, 25, 100, 200, 250ms (selectable during ordering process) |
| Response Time | 2ms (10...90%) |
| Electrical Connection | JST or Flex. cable |
| Materials Exposed to Vacuum | ceramics (Al2O3), stainless steel (AISI 316L) |
| Tightness, leak rate | <1E-9mbar l/s |
| Mounting position | any |
| Mounting position | recommended vertical up |
Applications
1. Integration into custom vacuum instrumentation and systems
Key Features
1. High accuracy in a wide measurement range 2. Wide range and high precision 3. Excellent repeatability and long-term stability 4. Digital SPI interface for easy integration 5. Welded custom flange for calibrated sensor integration 6. Fast response time
Datasheet
Product Datasheet
PDF
Supplier Information
<p>INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process-control software that enhance productivity and quality in vacuum-based manufacturing. Its analysis, measurement and control products are widely used in semiconductors, thin-film coating, flat-panel displays, solar cells, automotive and refrigeration leak detection, life sciences and more. Headquartered in Switzerland (listed on SIX as IFCN), INFICON established its China operation (a wholly owned subsidiary) with a Shanghai manufacturing plant in 2006 and sales offices in Beijing, Shanghai, Guangzhou and Hong Kong.</p>
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