Spot™ CDS530D

Spot™ CDS530D

Supplier
Inficon
Part Number
Spot™ CDS530D
Category
Other
Origin
China

The Spot™ CDS530D is a ceramic capacitance diaphragm sensor designed for integration into limited spaces in vacuum instruments and systems. It offers high accuracy over a wide measurement range, with alumina ceramic cells and stainless steel feedthroughs for durability. The sensor features a digital SPI interface for easy integration, fast response time, excellent repeatability, and long-term stability.

Specification Snapshot
Power Consumption
<0.05W operation
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Overview

The Spot™ CDS530D is a ceramic capacitance diaphragm sensor designed for integration into limited spaces in vacuum instruments and systems. It offers high accuracy over a wide measurement range, with alumina ceramic cells and stainless steel feedthroughs for durability. The sensor features a digital SPI interface for easy integration, fast response time, excellent repeatability, and long-term stability.

Specifications

ParameterValue
Full scale (FS) 1000 Torr0.5% of reading
Full scale (FS) 300 Torr0.5% of reading
Full scale (FS) 100 Torr0.5% of reading
Full scale (FS) 30 Torr0.5% of reading
Full scale (FS) 10 Torr0.5% of reading
Temperature effect on zero0.01%FS/°C
Temperature Effect on Span0.01% of reading/°C
Resolution0.01%FS/°C
Long time stability0.5%FS/year
Lowest reading0.05%FS
Measuring range0.1...100%FS
Compensated range10...50°C
Storage temperature-20...80°C
Ambient humidity limits<80%RH non-condensing
Maximum admissible pressure400kPa absolute
Burst pressure800kPa absolute
Supply Voltage5±0.25VDC
Supply voltage ripple≤50mVpp
Power Consumption<0.05W operation
Digital InterfaceSPI bus
Data Rate1, 2.5, 5, 10, 25, 100, 200, 250ms (selectable during ordering process)
Response Time2ms (10...90%)
Electrical ConnectionJST or Flex. cable
Materials Exposed to Vacuumceramics (Al2O3), stainless steel (AISI 316L)
Tightness, leak rate<1E-9mbar l/s
Mounting positionany
Mounting positionrecommended vertical up

Applications

1. Integration into custom vacuum instrumentation and systems

Key Features

1. High accuracy in a wide measurement range 2. Wide range and high precision 3. Excellent repeatability and long-term stability 4. Digital SPI interface for easy integration 5. Welded custom flange for calibrated sensor integration 6. Fast response time

Datasheet

Product Datasheet
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Supplier Information

In
Inficon
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<p>INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process-control software that enhance productivity and quality in vacuum-based manufacturing. Its analysis, measurement and control products are widely used in semiconductors, thin-film coating, flat-panel displays, solar cells, automotive and refrigeration leak detection, life sciences and more. Headquartered in Switzerland (listed on SIX as IFCN), INFICON established its China operation (a wholly owned subsidiary) with a Shanghai manufacturing plant in 2006 and sales offices in Beijing, Shanghai, Guangzhou and Hong Kong.</p>

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