Spot CDS500D

Spot CDS500D

Supplier
Inficon
Part Number
Spot CDS500D
Category
Other
Origin
China

The Spot CDS500D ceramic capacitance diaphragm sensor is designed for integration into limited spaces in vacuum instruments and systems. It offers high accuracy, long-term stability, and fast response time, making it ideal for precise pressure measurement.

Specification Snapshot
Resolution
0.01% FS/°C
Power Consumption
<0.05W operation
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Overview

The Spot CDS500D ceramic capacitance diaphragm sensor is designed for integration into limited spaces in vacuum instruments and systems. It offers high accuracy, long-term stability, and fast response time, making it ideal for precise pressure measurement.

Specifications

ParameterValue
Accuracy0.5% of reading
Temperature Effect on Zero0.01% FS/°C
Temperature Effect on Span0.01% of reading/°C
Resolution0.01% FS/°C
Long time stability0.5% FS/year
Lowest reading0.05% FS
Measuring Range0.1...100% FS
Compensated temperature range10...50°C
Storage temperature-20...80°C
Ambient humidity limits<80% RH non-condensing
Maximum admissible pressure400kPa absolute
Burst pressure800kPa absolute
Supply Voltage5±0.25VDC
Supply voltage ripple≤50mVp-p
Power Consumption<0.05W operation
Digital InterfaceSPI bus
Data Rate1, 2.5, 5, 10, 25, 100, 200, 250ms (selectable during ordering process)
Response Time2ms (10...90%)
Electrical ConnectionJST or Flex cable
Materials Exposed to Vacuumceramics (Al2O3), stainless steel (AISI 316L)
Tightness, leak rate<1E-9mbar l/s
Mounting positionany
Mounting positionrecommended vertical up

Applications

1. Integration into custom vacuum instrumentation 2. Integration into vacuum systems

Key Features

1. High accuracy 2. Excellent repeatability and long-term stability 3. Weldable feedthrough for custom integration and calibration 4. SPI interface for easy integration 5. Fast response time

Datasheet

Product Datasheet
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Supplier Information

In
Inficon
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<p>INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process-control software that enhance productivity and quality in vacuum-based manufacturing. Its analysis, measurement and control products are widely used in semiconductors, thin-film coating, flat-panel displays, solar cells, automotive and refrigeration leak detection, life sciences and more. Headquartered in Switzerland (listed on SIX as IFCN), INFICON established its China operation (a wholly owned subsidiary) with a Shanghai manufacturing plant in 2006 and sales offices in Beijing, Shanghai, Guangzhou and Hong Kong.</p>

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