MPG40x High Vacuum Gauge
The MPG40x series combines advanced technologies to measure vacuum pressure from 5×10⁻⁹ mbar to atmospheric pressure. It integrates multiple technologies into a single compact device, significantly reducing installation and system integration costs.
Specification Snapshot
Power Consumption
≤2W
Response Time p>10⁻³mbar
<10ms
Cable Length
≤50m (8×0.14mm²)
Operating Voltage
≤3.3kV
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Overview
The MPG40x series combines advanced technologies to measure vacuum pressure from 5×10⁻⁹ mbar to atmospheric pressure. It integrates multiple technologies into a single compact device, significantly reducing installation and system integration costs.
Specifications
| Parameter | Value |
|---|---|
| Measurement Range (Air, N₂) | 5×10⁻⁹...1000mbar |
| Measurement Range (Air, N₂) Torr | 3.8×10⁻⁹...760 |
| Accuracy (N₂) | 1×10⁻⁸...100mbar ±30% |
| Repeatability | 1×10⁻⁸...100mbar ±5% |
| Installation Position | any |
| Permissible Pressure | 3bar (limited to inert gases) |
| Operating Temperature (Ambient) | +5...+55°C |
| Storage Temperature | -40...+65°C |
| Bakeout | 150°C |
| Filament Temperature (Pirani) | 120°C |
| Power Supply Voltage | +15...+30Vdc |
| Power Supply Voltage (2) | +16...+30Vdc |
| Power Supply Voltage Ripple | ≤1V(p-p) |
| Power Consumption | ≤2W |
| Connectable Fuse | ≤1AT |
| Measurement Range | +1.82...+8.6V |
| Voltage Compression | logarithmic, 0.6 volts per decade |
| Cross Section Signal Without Power | <0.5V |
| Pirani Sensor, Single Filament Break | >9.5V |
| Output Resistance | 2×10Ω |
| Minimum Load Resistance | 10kΩ, short-circuit proof |
| Response Time p>10⁻³mbar | <10ms |
| Response Time p=10⁻³mbar | ≈1000ms |
| Vacuum Gauge Identification | 85, referenced to supply common |
| Status Pirani/Cold Cathode Mode | 15...30 (high) |
| Status LED | LED green |
| Status LED | high voltage on |
| Electrical Connection | FCC68 appliance connector, 8 poles, female |
| Cable Length | ≤50m (8×0.14mm²) |
| Operating Voltage | ≤3.3kV |
| Operating Current | ≤500μA |
| Materials Exposed to Vacuum | stainless steel, Al₂O₃, FPM75, Mo, Ni, Au, W |
| Internal Volume | ≈20cm³ |
| Weight DN25 ISO-KF | ≈700g |
| Weight DN40 ISO-KF | ≈720g |
| Weight DN40 CF-F | ≈980g |
| Protection Class | IP40 |
| Standards | EN61000-6-2, EN61000-6-3, EN61010-1 |
Applications
1. High vacuum measurement in scientific research 2. Industrial vacuum systems 3. Semiconductor manufacturing 4. Vacuum coating processes
Key Features
1. Composite vacuum gauge with inverted magnetron and Pirani sensor 2. Measurement range from 5×10⁻⁹ mbar to atmospheric pressure 3. No single filament break issues 4. Excellent ignition characteristics 5. Easy cleaning 6. FPM or metal-sealed vacuum interface 7. High-pressure LED indicator 8. Analog signal output
Datasheet
Product Datasheet
PDF
Supplier Information
<p>INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process-control software that enhance productivity and quality in vacuum-based manufacturing. Its analysis, measurement and control products are widely used in semiconductors, thin-film coating, flat-panel displays, solar cells, automotive and refrigeration leak detection, life sciences and more. Headquartered in Switzerland (listed on SIX as IFCN), INFICON established its China operation (a wholly owned subsidiary) with a Shanghai manufacturing plant in 2006 and sales offices in Beijing, Shanghai, Guangzhou and Hong Kong.</p>
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