MPG40x High Vacuum Gauge

MPG40x High Vacuum Gauge

Supplier
Inficon
Part Number
MPG40x High Vacuum Gauge
Category
Other
Origin
China

The MPG40x series combines advanced technologies to measure vacuum pressure from 5×10⁻⁹ mbar to atmospheric pressure. It integrates multiple technologies into a single compact device, significantly reducing installation and system integration costs.

Specification Snapshot
Power Consumption
≤2W
Response Time p>10⁻³mbar
<10ms
Cable Length
≤50m (8×0.14mm²)
Operating Voltage
≤3.3kV
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Overview

The MPG40x series combines advanced technologies to measure vacuum pressure from 5×10⁻⁹ mbar to atmospheric pressure. It integrates multiple technologies into a single compact device, significantly reducing installation and system integration costs.

Specifications

ParameterValue
Measurement Range (Air, N₂)5×10⁻⁹...1000mbar
Measurement Range (Air, N₂) Torr3.8×10⁻⁹...760
Accuracy (N₂)1×10⁻⁸...100mbar ±30%
Repeatability1×10⁻⁸...100mbar ±5%
Installation Positionany
Permissible Pressure3bar (limited to inert gases)
Operating Temperature (Ambient)+5...+55°C
Storage Temperature-40...+65°C
Bakeout150°C
Filament Temperature (Pirani)120°C
Power Supply Voltage+15...+30Vdc
Power Supply Voltage (2)+16...+30Vdc
Power Supply Voltage Ripple≤1V(p-p)
Power Consumption≤2W
Connectable Fuse≤1AT
Measurement Range+1.82...+8.6V
Voltage Compressionlogarithmic, 0.6 volts per decade
Cross Section Signal Without Power<0.5V
Pirani Sensor, Single Filament Break>9.5V
Output Resistance2×10Ω
Minimum Load Resistance10kΩ, short-circuit proof
Response Time p>10⁻³mbar<10ms
Response Time p=10⁻³mbar≈1000ms
Vacuum Gauge Identification85, referenced to supply common
Status Pirani/Cold Cathode Mode15...30 (high)
Status LEDLED green
Status LEDhigh voltage on
Electrical ConnectionFCC68 appliance connector, 8 poles, female
Cable Length≤50m (8×0.14mm²)
Operating Voltage≤3.3kV
Operating Current≤500μA
Materials Exposed to Vacuumstainless steel, Al₂O₃, FPM75, Mo, Ni, Au, W
Internal Volume≈20cm³
Weight DN25 ISO-KF≈700g
Weight DN40 ISO-KF≈720g
Weight DN40 CF-F≈980g
Protection ClassIP40
StandardsEN61000-6-2, EN61000-6-3, EN61010-1

Applications

1. High vacuum measurement in scientific research 2. Industrial vacuum systems 3. Semiconductor manufacturing 4. Vacuum coating processes

Key Features

1. Composite vacuum gauge with inverted magnetron and Pirani sensor 2. Measurement range from 5×10⁻⁹ mbar to atmospheric pressure 3. No single filament break issues 4. Excellent ignition characteristics 5. Easy cleaning 6. FPM or metal-sealed vacuum interface 7. High-pressure LED indicator 8. Analog signal output

Datasheet

Product Datasheet
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Supplier Information

In
Inficon
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<p>INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process-control software that enhance productivity and quality in vacuum-based manufacturing. Its analysis, measurement and control products are widely used in semiconductors, thin-film coating, flat-panel displays, solar cells, automotive and refrigeration leak detection, life sciences and more. Headquartered in Switzerland (listed on SIX as IFCN), INFICON established its China operation (a wholly owned subsidiary) with a Shanghai manufacturing plant in 2006 and sales offices in Beijing, Shanghai, Guangzhou and Hong Kong.</p>

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