MAG050, MAG060, MAG070
MAG050, MAG060, and MAG070 are passive inverted magnetron cold cathode gauges designed for vacuum measurement in the pressure range from 1×10⁻¹¹ mbar to 5×10⁻³ mbar. They are robust and suitable for demanding applications requiring high temperature resistance and radiation resistance.
Specification Snapshot
Voltage (within measuring chamber)
≤3.3kV
Maximum Cable Length
≤100m (MAG050, MAG060), ≤500m (MAG070)
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Overview
MAG050, MAG060, and MAG070 are passive inverted magnetron cold cathode gauges designed for vacuum measurement in the pressure range from 1×10⁻¹¹ mbar to 5×10⁻³ mbar. They are robust and suitable for demanding applications requiring high temperature resistance and radiation resistance.
Specifications
| Parameter | Value |
|---|---|
| Measurement System | Cold cathode ionization (inverted magnetron principle) |
| Measurement Range MAG050 | 2×10⁻²...5×10⁻³ mbar |
| Measurement Range MAG060 | 1×10⁻¹⁰...5×10⁻³ mbar |
| Measurement Range MAG070 | 1×10⁻¹¹...5×10⁻³ mbar |
| Accuracy | 30% of reading |
| Repeatability | 5% of reading |
| Mounting Orientation | Any |
| Admissible Temperature Operation | +5...+80°C |
| Admissible Temperature Operation with High Temperature Cable | +5...+150°C (MAG050), +5...+250°C (MAG060, MAG070) |
| Bakeout Temperature | 150°C (MAG050), 250°C (MAG060, MAG070) |
| Storage Temperature | -40...+80°C |
| Relative Humidity | Max. 80% at temperature up to +30°C, decreasing to 50% at +45°C |
| Radiation Resistance | 1×10⁷ Gy (MAG060, MAG070) |
| Voltage (within measuring chamber) | ≤3.3kV |
| Current (within measuring chamber) | ≤700μA |
| Electrical Connection Type | Coaxial (MAG050, MAG060), Triaxial (MAG070) |
| Connector | Bayonet, SHV (MAG050, MAG060), Push-pull self-latching, triax (MAG070) |
| Maximum Cable Length | ≤100m (MAG050, MAG060), ≤500m (MAG070) |
| Overpressure | ≤9bar (limited inert gases) |
| Protection Category | IP40 |
| Materials Exposed to Vacuum | Stainless steel (EN 1.4306, 1.4104, 1.4306) |
| Vacuum Chamber | Stainless steel |
| Feedthrough | Al₂O₃ |
| Internal Seal | FPM |
| Anode | Mo |
| Ignition Aid | Stainless steel (EN 1.4310) |
| Internal Volume | ~20cm³ |
| Weight | 600g (DN 25/40 ISO-KF), 850g (DN 40 CF-F) |
Applications
1. General vacuum measurement 2. High-temperature applications 3. High vacuum range applications
Key Features
1. Reliable and proven gauge head design 2. Large vacuum pressure measurement range 3. Bakeable to high temperatures 4. Good ignition properties 5. Corrosion resistance with ceramic feedthrough 6. Radiation resistance for demanding applications 7. Easy maintenance and cleaning
Datasheet
Product Datasheet
PDF
Supplier Information
<p>INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process-control software that enhance productivity and quality in vacuum-based manufacturing. Its analysis, measurement and control products are widely used in semiconductors, thin-film coating, flat-panel displays, solar cells, automotive and refrigeration leak detection, life sciences and more. Headquartered in Switzerland (listed on SIX as IFCN), INFICON established its China operation (a wholly owned subsidiary) with a Shanghai manufacturing plant in 2006 and sales offices in Beijing, Shanghai, Guangzhou and Hong Kong.</p>
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