IM540 Vacuum Gauge Controller
The IM540 Vacuum Gauge Controller is a versatile ionization gauge controller designed for precise vacuum measurement and control across a wide range, from 10⁻¹² mbar to atmospheric pressure. It integrates up to four measurement principles, including Pirani, capacitive diaphragm, Bayard-Alpert, and Extractor, ensuring reliable operation in complex process control systems.
Specification Snapshot
Measurement channel
3
Measurement Unit
mbar
Measurement Unit
Torr
Measurement Unit
Pa
Measurement Unit
hPa
Measurement Unit
Micron
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Overview
The IM540 Vacuum Gauge Controller is a versatile ionization gauge controller designed for precise vacuum measurement and control across a wide range, from 10⁻¹² mbar to atmospheric pressure. It integrates up to four measurement principles, including Pirani, capacitive diaphragm, Bayard-Alpert, and Extractor, ensuring reliable operation in complex process control systems.
Specifications
| Parameter | Value |
|---|---|
| Measurement channel | 3 |
| Display | LCD |
| Display | LED backlight |
| Display Rate | 4s⁻¹ |
| Measurement Range IE414 (Bayard-Alpert) | 1×10⁻¹¹...1×10⁻²mbar | 0.75×10⁻¹¹...0.75×10⁻²Torr |
| Measurement Range IE514 (Extractor) | 1×10⁻¹²...1×10⁻²mbar | 0.75×10⁻¹²...0.75×10⁻²Torr |
| Measurement Unit | mbar |
| Measurement Unit | Torr |
| Measurement Unit | Pa |
| Measurement Unit | hPa |
| Measurement Unit | Micron |
| Measurement Unit | V |
| Measurement Range Switching | Automatic or decade pre-select |
| Trend Indication | Bargraph |
| Emission Current IE414 (Bayard-Alpert) | 0.1...10mA, automatic control |
| Emission Current IE514 (Extractor) | 1.6mA |
| Emission Current Shutdown | p>1×10⁻²mbar, broken cathode, short-circuit, interruption of the electric circuit |
| Degassing Power IE414 (Bayard-Alpert) | 41W |
| Degassing Power IE514 (Extractor) | 21W |
| Gauge Supply Anode IE414/IE514 | 220V |
| Gauge Supply Cathode IE414/IE514 | 80V/10V |
| Gauge Supply Reflector IE514 | 205V |
| Sensor Connections | 2×IE414 or IE514 (single operation or automatic switch-over for redundant operation) | 2×PSG50x/PSG51x-S (Pirani) or CDG025D/045D |
| Measurement System Detection | Automatically |
| Measurement System Switchover | Automatically |
| Measurement System Switchover | pressure dependent |
| Measurement System Switchover | error dependent |
| Chart Recorder Outputs | Logarithmic 0 to 10V (1V/dec) or linear 0 to 10V | Error indication U>10.5V |
| Interface | RS232C, Profibus (with IF540P) |
| Switching Thresholds | 2 with floating changeover contact (or interval) |
| Power Supply Voltage | 90...264V (AC) |
| Power Supply Frequency | 47...63Hz |
| Operating Temperature | +5...+40°C |
| Storage temperature | -20...+60°C |
| Weight | ~3.0kg | ~6.62lb |
| Dimensions | 213×247.4×208.7mm |
Applications
1. Scientific research requiring precise vacuum measurement 2. R&D applications involving ultra-high vacuum range
Key Features
1. Supports operation of IE414 (Bayard-Alpert) and IE514 (Extractor) hot cathode ionization gauges 2. Two active gauges from PSG5xx (Pirani) and CDG (Capacitance diaphragm) can be connected and operated 3. Simple operation with menu-guided display for parameter, sensor, or general settings 4. Built-in RS232 communication interface, optional Profibus DP communication card (IF540P) 5. High resolution with 16-bit A/D converter 6. Two programmable 0 to 10V chart recorder outputs
Datasheet
Product Datasheet
PDF
Supplier Information
<p>INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process-control software that enhance productivity and quality in vacuum-based manufacturing. Its analysis, measurement and control products are widely used in semiconductors, thin-film coating, flat-panel displays, solar cells, automotive and refrigeration leak detection, life sciences and more. Headquartered in Switzerland (listed on SIX as IFCN), INFICON established its China operation (a wholly owned subsidiary) with a Shanghai manufacturing plant in 2006 and sales offices in Beijing, Shanghai, Guangzhou and Hong Kong.</p>
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