IM540 Vacuum Gauge Controller

IM540 Vacuum Gauge Controller

Supplier
Inficon
Part Number
IM540 Vacuum Gauge Controller
Category
Other
Origin
China

The IM540 Vacuum Gauge Controller is a versatile ionization gauge controller designed for precise vacuum measurement and control across a wide range, from 10⁻¹² mbar to atmospheric pressure. It integrates up to four measurement principles, including Pirani, capacitive diaphragm, Bayard-Alpert, and Extractor, ensuring reliable operation in complex process control systems.

Specification Snapshot
Measurement channel
3
Measurement Unit
mbar
Measurement Unit
Torr
Measurement Unit
Pa
Measurement Unit
hPa
Measurement Unit
Micron
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Overview

The IM540 Vacuum Gauge Controller is a versatile ionization gauge controller designed for precise vacuum measurement and control across a wide range, from 10⁻¹² mbar to atmospheric pressure. It integrates up to four measurement principles, including Pirani, capacitive diaphragm, Bayard-Alpert, and Extractor, ensuring reliable operation in complex process control systems.

Specifications

ParameterValue
Measurement channel3
DisplayLCD
DisplayLED backlight
Display Rate4s⁻¹
Measurement Range IE414 (Bayard-Alpert)1×10⁻¹¹...1×10⁻²mbar | 0.75×10⁻¹¹...0.75×10⁻²Torr
Measurement Range IE514 (Extractor)1×10⁻¹²...1×10⁻²mbar | 0.75×10⁻¹²...0.75×10⁻²Torr
Measurement Unitmbar
Measurement UnitTorr
Measurement UnitPa
Measurement UnithPa
Measurement UnitMicron
Measurement UnitV
Measurement Range SwitchingAutomatic or decade pre-select
Trend IndicationBargraph
Emission Current IE414 (Bayard-Alpert)0.1...10mA, automatic control
Emission Current IE514 (Extractor)1.6mA
Emission Current Shutdownp>1×10⁻²mbar, broken cathode, short-circuit, interruption of the electric circuit
Degassing Power IE414 (Bayard-Alpert)41W
Degassing Power IE514 (Extractor)21W
Gauge Supply Anode IE414/IE514220V
Gauge Supply Cathode IE414/IE51480V/10V
Gauge Supply Reflector IE514205V
Sensor Connections2×IE414 or IE514 (single operation or automatic switch-over for redundant operation) | 2×PSG50x/PSG51x-S (Pirani) or CDG025D/045D
Measurement System DetectionAutomatically
Measurement System SwitchoverAutomatically
Measurement System Switchoverpressure dependent
Measurement System Switchovererror dependent
Chart Recorder OutputsLogarithmic 0 to 10V (1V/dec) or linear 0 to 10V | Error indication U>10.5V
InterfaceRS232C, Profibus (with IF540P)
Switching Thresholds2 with floating changeover contact (or interval)
Power Supply Voltage90...264V (AC)
Power Supply Frequency47...63Hz
Operating Temperature+5...+40°C
Storage temperature-20...+60°C
Weight~3.0kg | ~6.62lb
Dimensions213×247.4×208.7mm

Applications

1. Scientific research requiring precise vacuum measurement 2. R&D applications involving ultra-high vacuum range

Key Features

1. Supports operation of IE414 (Bayard-Alpert) and IE514 (Extractor) hot cathode ionization gauges 2. Two active gauges from PSG5xx (Pirani) and CDG (Capacitance diaphragm) can be connected and operated 3. Simple operation with menu-guided display for parameter, sensor, or general settings 4. Built-in RS232 communication interface, optional Profibus DP communication card (IF540P) 5. High resolution with 16-bit A/D converter 6. Two programmable 0 to 10V chart recorder outputs

Datasheet

Product Datasheet
PDF
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Supplier Information

In
Inficon
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<p>INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process-control software that enhance productivity and quality in vacuum-based manufacturing. Its analysis, measurement and control products are widely used in semiconductors, thin-film coating, flat-panel displays, solar cells, automotive and refrigeration leak detection, life sciences and more. Headquartered in Switzerland (listed on SIX as IFCN), INFICON established its China operation (a wholly owned subsidiary) with a Shanghai manufacturing plant in 2006 and sales offices in Beijing, Shanghai, Guangzhou and Hong Kong.</p>

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