Gemini™ MxG5xx
Gemini™ MxG5xx is a versatile vacuum gauge designed for applications ranging from atmospheric pressure to ultra-high vacuum. It combines multiple measurement systems into one compact device, offering high accuracy and reliability.
Specification Snapshot
Power Consumption MAG5xx
≤2W
Power Consumption MPG5xx
≤2W
Power Current MAG5xx
≤1A
Power Current MPG5xx
≤1A
Operating Voltage MAG5xx
<3.3kV
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Overview
Gemini™ MxG5xx is a versatile vacuum gauge designed for applications ranging from atmospheric pressure to ultra-high vacuum. It combines multiple measurement systems into one compact device, offering high accuracy and reliability.
Specifications
| Parameter | Value |
|---|---|
| Measurement Range (Air, N2) MAG5xx (mbar) | 1×10⁻⁹...1×10⁻² |
| Measurement Range (Air, N2) MPG5xx (mbar) | 1×10⁻⁹...1000 |
| Measurement Range (Air, N2) MAG5xx (Torr) | 7.6×10⁻¹⁰...7.6×10⁻³ |
| Measurement Range (Air, N2) MPG5xx (Torr) | 7.6×10⁻¹⁰...760 |
| Standard Accuracy (N2) MAG5xx | 30% of reading |
| Standard Accuracy (N2) MPG5xx | 30% of reading |
| Repeatability (N2) MAG5xx | 5% of reading |
| Repeatability (N2) MPG5xx | 5% of reading |
| Permissible Pressure | 10bar (limited to inert gases <55°C) |
| Operating Temperature | +5°C...+55°C |
| Storage Temperature | -40°C...+70°C |
| Supply Voltage MAG5xx | +14.5V...+30V |
| Supply Voltage MPG5xx | +14.5V...+30V |
| Power Consumption MAG5xx | ≤2W |
| Power Consumption MPG5xx | ≤2W |
| Power Voltage Ripple | ≤1V(p-p) |
| Power Current MAG5xx | ≤1A |
| Power Current MPG5xx | ≤1A |
| Operating Voltage MAG5xx | <3.3kV |
| Operating Voltage MPG5xx | <500μA |
| Weight (DN25 ISO-KF) MAG5xx | <280g |
| Weight (DN25 ISO-KF) MPG5xx | <500g |
| Protection Class | IP40 |
| Communication Standard | ETG.5003.1 S (R) V1.1.0, ETG.5003.2080 S (R) V1.3.0 |
| Digital Functions | Read pressure, select units (Torr, mbar, Pa, micron, counts), monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error |
Applications
1. Vacuum measurement in harsh environments 2. Semiconductor manufacturing 3. Research laboratories 4. Industrial vacuum systems
Key Features
1. Long lifetime in harsh environments 2. Low stray magnetic field 3. Easy maintenance with replaceable sensor heads 4. Compact design 5. High accuracy and reliability
Datasheet
Product Datasheet
PDF
Supplier Information
<p>INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process-control software that enhance productivity and quality in vacuum-based manufacturing. Its analysis, measurement and control products are widely used in semiconductors, thin-film coating, flat-panel displays, solar cells, automotive and refrigeration leak detection, life sciences and more. Headquartered in Switzerland (listed on SIX as IFCN), INFICON established its China operation (a wholly owned subsidiary) with a Shanghai manufacturing plant in 2006 and sales offices in Beijing, Shanghai, Guangzhou and Hong Kong.</p>
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