Gemini™ MxG5xx

Gemini™ MxG5xx

Supplier
Inficon
Part Number
Gemini™ MxG5xx
Category
Other
Origin
China

Gemini™ MxG5xx is a versatile vacuum gauge designed for applications ranging from atmospheric pressure to ultra-high vacuum. It combines multiple measurement systems into one compact device, offering high accuracy and reliability.

Specification Snapshot
Power Consumption MAG5xx
≤2W
Power Consumption MPG5xx
≤2W
Power Current MAG5xx
≤1A
Power Current MPG5xx
≤1A
Operating Voltage MAG5xx
<3.3kV
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Overview

Gemini™ MxG5xx is a versatile vacuum gauge designed for applications ranging from atmospheric pressure to ultra-high vacuum. It combines multiple measurement systems into one compact device, offering high accuracy and reliability.

Specifications

ParameterValue
Measurement Range (Air, N2) MAG5xx (mbar)1×10⁻⁹...1×10⁻²
Measurement Range (Air, N2) MPG5xx (mbar)1×10⁻⁹...1000
Measurement Range (Air, N2) MAG5xx (Torr)7.6×10⁻¹⁰...7.6×10⁻³
Measurement Range (Air, N2) MPG5xx (Torr)7.6×10⁻¹⁰...760
Standard Accuracy (N2) MAG5xx30% of reading
Standard Accuracy (N2) MPG5xx30% of reading
Repeatability (N2) MAG5xx5% of reading
Repeatability (N2) MPG5xx5% of reading
Permissible Pressure10bar (limited to inert gases <55°C)
Operating Temperature+5°C...+55°C
Storage Temperature-40°C...+70°C
Supply Voltage MAG5xx+14.5V...+30V
Supply Voltage MPG5xx+14.5V...+30V
Power Consumption MAG5xx≤2W
Power Consumption MPG5xx≤2W
Power Voltage Ripple≤1V(p-p)
Power Current MAG5xx≤1A
Power Current MPG5xx≤1A
Operating Voltage MAG5xx<3.3kV
Operating Voltage MPG5xx<500μA
Weight (DN25 ISO-KF) MAG5xx<280g
Weight (DN25 ISO-KF) MPG5xx<500g
Protection ClassIP40
Communication StandardETG.5003.1 S (R) V1.1.0, ETG.5003.2080 S (R) V1.3.0
Digital FunctionsRead pressure, select units (Torr, mbar, Pa, micron, counts), monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error

Applications

1. Vacuum measurement in harsh environments 2. Semiconductor manufacturing 3. Research laboratories 4. Industrial vacuum systems

Key Features

1. Long lifetime in harsh environments 2. Low stray magnetic field 3. Easy maintenance with replaceable sensor heads 4. Compact design 5. High accuracy and reliability

Datasheet

Product Datasheet
PDF
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Supplier Information

In
Inficon
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<p>INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process-control software that enhance productivity and quality in vacuum-based manufacturing. Its analysis, measurement and control products are widely used in semiconductors, thin-film coating, flat-panel displays, solar cells, automotive and refrigeration leak detection, life sciences and more. Headquartered in Switzerland (listed on SIX as IFCN), INFICON established its China operation (a wholly owned subsidiary) with a Shanghai manufacturing plant in 2006 and sales offices in Beijing, Shanghai, Guangzhou and Hong Kong.</p>

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