BPG402-Sx Atmospheric to Ultra-High Vacuum Gauge
The INFICON BPG402-Sx combines Bayard-Alpert and Pirani technologies into a single compact device, offering a wide measurement range from 5×10⁻¹⁰ mbar to 1000 mbar. It is designed for reliable pressure measurement in various vacuum applications.
Specification Snapshot
Cable Length
≤100m (330ft)
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Overview
The INFICON BPG402-Sx combines Bayard-Alpert and Pirani technologies into a single compact device, offering a wide measurement range from 5×10⁻¹⁰ mbar to 1000 mbar. It is designed for reliable pressure measurement in various vacuum applications.
Specifications
| Parameter | Value |
|---|---|
| Measurement Range (Air, O₂, CO, N₂) | 5×10⁻¹⁰...1000mbar |
| Measurement Range (Air, O₂, CO, N₂) Torr | 3.8×10⁻¹⁰...750 |
| Accuracy | ±15% of reading |
| Repeatability | 5% of reading |
| DEGAS | Electron bombardment, max. 3min |
| Pressure, Max | 2bar (absolute) |
| Storage Temperature | -20...+70°C |
| Bakeout at Flange, No Electronics BPG402-S | 80°C |
| Bakeout at Flange, No Electronics BPG402-SL | 150°C |
| Supply Voltage | +20...+28V(dc) |
| Supply Current | ≤0.8A(dc) |
| Measurement Range | +0.774...+10V |
| Error Signal | 0.1/0.3/0.5V |
| Output Signal Slope | 0.75volts per decade |
| Max Load Resistance | 10kΩ |
| Setpoint Relay Quantity | 2 |
| Setpoint Relay Contact | n.o., potential free |
| Setpoint Relay Range | 1×10⁻⁹...100mbar |
| Setpoint Relay Hysteresis | 10% of reading |
| Setpoint Relay Hotspot Rating | ≤30V(dc), ≤0.5A(dc) |
| Digital Function Interface | RS232C |
| Emission Control | Automatic/manual via interface |
| Filament | Two Y₂O₃ coated Ir |
| Electrical Connection | D-Sub, 15-pin, male |
| Max Cable Length | 100m (330ft) |
| Materials Exposed to Vacuum | Y₂O₃, Ir, Pt, Mo, Cu, W, NiFe, NiCr, stainless steel, glass |
| Internal Volume KF/CF | 24cm³ (1.46in³)/34cm³ (2.1in³) |
| Weight KF/CF | 450g/710g |
| Protection Class | IP30 |
| Profibus DP Baud Rate | 1.5/12Mbaud |
| Profibus DP Address | 2 switches (address 00-127) or network programmable |
| Digital Functions | Read pressure, select units: Torr, mbar, Pa; emission control, degas function, monitor gauge status, filament status, safe state allows definition of behavior in case of error, detailed alarm and warning |
| Analog Functions | 0...10V analog output pressure indication, two setpoint relays A+B |
| Protocol | DeviceNet™, group 2 slave only |
| MAC ID | 2 switches (address 00-63) or network programmable |
| Technical Specifications | DeviceNet™ Vacuum Gauge Device Profile |
| Device Type | CG for combination gauge |
| I/O Slave Information | Polling only |
| DeviceNet™ Baud Rate | 125, 250, 500kBaud |
| Cable Length 125kbps | 500m (1650ft) |
| Cable Length 250kbps | 250m (825ft) |
| Cable Length 500kbps | 100m (330ft) |
| Vacuum Gauge Supply Voltage | +11...+25V(dc) |
| Vacuum Gauge Supply Current | ≤0.5A(dc) |
| Ethernet Protocol | Protocol specialized for EtherCAT |
| Communication Standard | ETG.5003.1 S (R) V1.1.0: Part 1 Common Device Profile (CDP) ETG.5003.2080 S (R) V1.3.0: Part 2080: Specific Device Profile (SDP) Vacuum Pressure Gauge |
| Node Address | Explicit Device Identification |
| Physical Layer | 100BASE-Tx (IEEE 802.3) |
| Ethernet Digital Functions | Read pressure, select units: Torr, mbar, Pa; emission control, degas function, monitor gauge status, filament status, safe state allows definition of behavior in case of error, detailed alarm and warning |
| Process Data | Fixed PDO mapping and configurable PDO mapping |
| Mailbox (CoE) | SDO requests |
| Mailbox (CoE) | responses and information |
| Ethernet Connector | RJ45, 8-pin (socket), IN and OUT |
| Cable | Shielded Ethernet CAT5e or higher |
| Cable Length | ≤100m (330ft) |
| Accessories | Baffle for BPG400, BPG402 Spare measurement system DN40CF-R, BPG402 Sensor, BPG400 24V Power Supply, Centering Ring with Baffle DN25 KF |
Applications
1. Semiconductor manufacturing 2. Vacuum coating processes 3. Research laboratories 4. Industrial vacuum systems
Key Features
1. Wide measurement range from atmospheric pressure to ultra-high vacuum 2. Dual filament design for extended lifespan 3. Compact and robust construction 4. RoHS compliant 5. High accuracy and repeatability
Datasheet
Product Datasheet
PDF
Supplier Information
<p>INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process-control software that enhance productivity and quality in vacuum-based manufacturing. Its analysis, measurement and control products are widely used in semiconductors, thin-film coating, flat-panel displays, solar cells, automotive and refrigeration leak detection, life sciences and more. Headquartered in Switzerland (listed on SIX as IFCN), INFICON established its China operation (a wholly owned subsidiary) with a Shanghai manufacturing plant in 2006 and sales offices in Beijing, Shanghai, Guangzhou and Hong Kong.</p>
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