BPG402-Sx Atmospheric to Ultra-High Vacuum Gauge

BPG402-Sx Atmospheric to Ultra-High Vacuum Gauge

Supplier
Inficon
Part Number
BPG402-Sx Atmospheric to Ultra-High Vacuum Gauge
Category
Other
Origin
China

The INFICON BPG402-Sx combines Bayard-Alpert and Pirani technologies into a single compact device, offering a wide measurement range from 5×10⁻¹⁰ mbar to 1000 mbar. It is designed for reliable pressure measurement in various vacuum applications.

Specification Snapshot
Cable Length
≤100m (330ft)
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Overview

The INFICON BPG402-Sx combines Bayard-Alpert and Pirani technologies into a single compact device, offering a wide measurement range from 5×10⁻¹⁰ mbar to 1000 mbar. It is designed for reliable pressure measurement in various vacuum applications.

Specifications

ParameterValue
Measurement Range (Air, O₂, CO, N₂)5×10⁻¹⁰...1000mbar
Measurement Range (Air, O₂, CO, N₂) Torr3.8×10⁻¹⁰...750
Accuracy±15% of reading
Repeatability5% of reading
DEGASElectron bombardment, max. 3min
Pressure, Max2bar (absolute)
Storage Temperature-20...+70°C
Bakeout at Flange, No Electronics BPG402-S80°C
Bakeout at Flange, No Electronics BPG402-SL150°C
Supply Voltage+20...+28V(dc)
Supply Current≤0.8A(dc)
Measurement Range+0.774...+10V
Error Signal0.1/0.3/0.5V
Output Signal Slope0.75volts per decade
Max Load Resistance10kΩ
Setpoint Relay Quantity2
Setpoint Relay Contactn.o., potential free
Setpoint Relay Range1×10⁻⁹...100mbar
Setpoint Relay Hysteresis10% of reading
Setpoint Relay Hotspot Rating≤30V(dc), ≤0.5A(dc)
Digital Function InterfaceRS232C
Emission ControlAutomatic/manual via interface
FilamentTwo Y₂O₃ coated Ir
Electrical ConnectionD-Sub, 15-pin, male
Max Cable Length100m (330ft)
Materials Exposed to VacuumY₂O₃, Ir, Pt, Mo, Cu, W, NiFe, NiCr, stainless steel, glass
Internal Volume KF/CF24cm³ (1.46in³)/34cm³ (2.1in³)
Weight KF/CF450g/710g
Protection ClassIP30
Profibus DP Baud Rate1.5/12Mbaud
Profibus DP Address2 switches (address 00-127) or network programmable
Digital FunctionsRead pressure, select units: Torr, mbar, Pa; emission control, degas function, monitor gauge status, filament status, safe state allows definition of behavior in case of error, detailed alarm and warning
Analog Functions0...10V analog output pressure indication, two setpoint relays A+B
ProtocolDeviceNet™, group 2 slave only
MAC ID2 switches (address 00-63) or network programmable
Technical SpecificationsDeviceNet™ Vacuum Gauge Device Profile
Device TypeCG for combination gauge
I/O Slave InformationPolling only
DeviceNet™ Baud Rate125, 250, 500kBaud
Cable Length 125kbps500m (1650ft)
Cable Length 250kbps250m (825ft)
Cable Length 500kbps100m (330ft)
Vacuum Gauge Supply Voltage+11...+25V(dc)
Vacuum Gauge Supply Current≤0.5A(dc)
Ethernet ProtocolProtocol specialized for EtherCAT
Communication StandardETG.5003.1 S (R) V1.1.0: Part 1 Common Device Profile (CDP) ETG.5003.2080 S (R) V1.3.0: Part 2080: Specific Device Profile (SDP) Vacuum Pressure Gauge
Node AddressExplicit Device Identification
Physical Layer100BASE-Tx (IEEE 802.3)
Ethernet Digital FunctionsRead pressure, select units: Torr, mbar, Pa; emission control, degas function, monitor gauge status, filament status, safe state allows definition of behavior in case of error, detailed alarm and warning
Process DataFixed PDO mapping and configurable PDO mapping
Mailbox (CoE)SDO requests
Mailbox (CoE)responses and information
Ethernet ConnectorRJ45, 8-pin (socket), IN and OUT
CableShielded Ethernet CAT5e or higher
Cable Length≤100m (330ft)
AccessoriesBaffle for BPG400, BPG402 Spare measurement system DN40CF-R, BPG402 Sensor, BPG400 24V Power Supply, Centering Ring with Baffle DN25 KF

Applications

1. Semiconductor manufacturing 2. Vacuum coating processes 3. Research laboratories 4. Industrial vacuum systems

Key Features

1. Wide measurement range from atmospheric pressure to ultra-high vacuum 2. Dual filament design for extended lifespan 3. Compact and robust construction 4. RoHS compliant 5. High accuracy and repeatability

Datasheet

Product Datasheet
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Supplier Information

In
Inficon
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<p>INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process-control software that enhance productivity and quality in vacuum-based manufacturing. Its analysis, measurement and control products are widely used in semiconductors, thin-film coating, flat-panel displays, solar cells, automotive and refrigeration leak detection, life sciences and more. Headquartered in Switzerland (listed on SIX as IFCN), INFICON established its China operation (a wholly owned subsidiary) with a Shanghai manufacturing plant in 2006 and sales offices in Beijing, Shanghai, Guangzhou and Hong Kong.</p>

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