BAG302 Bayard-Alpert Hot Ion Gauge
The BAG302 Bayard-Alpert Hot Ion Gauge is a compact and versatile vacuum measurement device designed for precise pressure measurement in semiconductor processes, industrial coating, and general vacuum control applications. It features a wide measurement range, dual filament sensor, OLED display, and RS485 digital interface for enhanced integration.
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Overview
The BAG302 Bayard-Alpert Hot Ion Gauge is a compact and versatile vacuum measurement device designed for precise pressure measurement in semiconductor processes, industrial coating, and general vacuum control applications. It features a wide measurement range, dual filament sensor, OLED display, and RS485 digital interface for enhanced integration.
Specifications
| Parameter | Value |
|---|---|
| Measurement Range | 1.3×10⁻⁹mbar to 6.7×10⁻²mbar, 1×10⁻⁹Torr to 5×10⁻²Torr, 1.3×10⁻⁷Pa to 6.7Pa |
| Accuracy | ±15% of reading |
| Repeatability | ±5% of reading |
| Bakeout Temperature | 200°C (sensor only, electronics removed) |
| Operating Temperature | 0°C to +40°C |
| Storage Temperature | -40°C to +70°C |
| Supply Voltage | +20V to +28V(dc) |
| Output Signal Analog | 0 to +9V (log linear) |
| Voltage vs. Pressure | 1V/Decade |
| Set Point Relay | 1A at 30V(dc) resistive, or V(ac) non-inductive |
| Digital Functions | Degas, filament on/off, emission control |
| Interface | RS485 |
| Emission Control | Manual |
| Filament Status | Display/Digital Output |
| Filament | Two Y₂O₃ coated Iridium |
| Materials Exposed to Vacuum | Y₂O₃, Ir, W, Ta, stainless steel, glass, Ni |
| Mounting Orientation | Any |
| Internal Volume | 16.4cm³ (1.0in³) |
| Weight KF/CF | 270g (0.6lb) |
Applications
1. Pressure measurement in semiconductor process and transfer chambers 2. Industrial coating 3. General vacuum measurement and control in the low to ultra-high vacuum range
Key Features
1. Wide measurement range from 1.3×10⁻⁹mbar to 6.7×10⁻²mbar 2. Two long-life yttrium oxide coated iridium filaments 3. All-in-One active gauge with built-in display, set-point, analog output, and RS485 digital interface 4. Bright digital OLED display with keypad for simple setup, operation, and programming 5. User programmable set point relay 6. User programmable display units in mbar, Torr, or Pa 7. User selectable auto-ranging of emission current 8. Mechanical strength and ruggedness 9. Choice of various flange options 10. Easy to exchange sensing element 11. Compliance & standards: CE, RoHS
Datasheet
Product Datasheet
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Supplier Information
<p>INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process-control software that enhance productivity and quality in vacuum-based manufacturing. Its analysis, measurement and control products are widely used in semiconductors, thin-film coating, flat-panel displays, solar cells, automotive and refrigeration leak detection, life sciences and more. Headquartered in Switzerland (listed on SIX as IFCN), INFICON established its China operation (a wholly owned subsidiary) with a Shanghai manufacturing plant in 2006 and sales offices in Beijing, Shanghai, Guangzhou and Hong Kong.</p>
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