Hydrocarbon Detector (HCD)
The Hydrocarbon Detector (HCD) is a broadband, non-selective sensor designed to monitor critical processes in harsh industrial manufacturing settings, such as semiconductor, solar, pharmaceutical, or other vacuum-based processes. It provides real-time detection of hydrocarbons and silicons with superior sensitivity, ensuring effective contamination control and process monitoring.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Operating Pressure Range | sub 1Torr - 1ATM |
| Limit of Detection | ppm to ppb based on operating pressure |
| Operating Temperature Range | -25°C to 180°C |
| Sensitivity (High Emission) | ≥2E-5Amps/Torr |
| Mounting Flange | Standard KF25; custom options available |
| Available Inputs/Outputs | 4-20mA, 0-10V analog, Modbus TCP |
| Contamination Measurement by UV Photoionization | 10/10.6eV Kr discharge |
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