Transpector APX Residual Gas Analyzer
The Transpector APX Residual Gas Analyzer is a cutting-edge solution for advanced semiconductor processes, offering real-time monitoring and precision measurement for applications such as ALD, CVD, PVD, and etch processes.
Specification Snapshot
Dimensions
Refer to product datasheet
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Overview
The Transpector APX Residual Gas Analyzer is a cutting-edge solution for advanced semiconductor processes, offering real-time monitoring and precision measurement for applications such as ALD, CVD, PVD, and etch processes.
Specifications
| Parameter | Value |
|---|---|
| Maximum Pressure | 1×10-3mbar |
| Total Pressure | ≤5×10-7mbar |
| Minimum Usable Operating Pressure | 1×10-3mbar |
| Maximum Operating Pressure | 1×10-3mbar |
| Sensitivity (High Emission) | >1×10-6A/mbar |
| Sensitivity (Low Emission) | >1×10-7A/mbar |
| Minimum Detectable Partial Pressure | <1×10-11mbar |
| Maximum Total Flow | <5×10-7mbar |
| Detection Limit | <1×10-11mbar |
| Dimensions | Refer to product datasheet |
Applications
1. Advanced Process Monitoring for ALD 2. CVD and PVD Processes 3. Etch Processes 4. Ion Implantation
Key Features
1. Real-time process monitoring 2. High sensitivity and precision 3. Automated calibration 4. EUV readiness 5. Innovative electron multiplier 6. Maximized uptime
Datasheet
Product Datasheet
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Supplier Information
<p>INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process-control software that enhance productivity and quality in vacuum-based manufacturing. Its analysis, measurement and control products are widely used in semiconductors, thin-film coating, flat-panel displays, solar cells, automotive and refrigeration leak detection, life sciences and more. Headquartered in Switzerland (listed on SIX as IFCN), INFICON established its China operation (a wholly owned subsidiary) with a Shanghai manufacturing plant in 2006 and sales offices in Beijing, Shanghai, Guangzhou and Hong Kong.</p>
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