Transpector APX Residual Gas Analyzer

Transpector APX Residual Gas Analyzer

Supplier
Inficon
Part Number
Transpector APX Residual Gas Analyzer
Category
Gas Analysis
Origin
China

The Transpector APX Residual Gas Analyzer is a cutting-edge solution for advanced semiconductor processes, offering real-time monitoring and precision measurement for applications such as ALD, CVD, PVD, and etch processes.

Specification Snapshot
Dimensions
Refer to product datasheet
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Overview

The Transpector APX Residual Gas Analyzer is a cutting-edge solution for advanced semiconductor processes, offering real-time monitoring and precision measurement for applications such as ALD, CVD, PVD, and etch processes.

Specifications

ParameterValue
Maximum Pressure1×10-3mbar
Total Pressure≤5×10-7mbar
Minimum Usable Operating Pressure1×10-3mbar
Maximum Operating Pressure1×10-3mbar
Sensitivity (High Emission)>1×10-6A/mbar
Sensitivity (Low Emission)>1×10-7A/mbar
Minimum Detectable Partial Pressure<1×10-11mbar
Maximum Total Flow<5×10-7mbar
Detection Limit<1×10-11mbar
DimensionsRefer to product datasheet

Applications

1. Advanced Process Monitoring for ALD 2. CVD and PVD Processes 3. Etch Processes 4. Ion Implantation

Key Features

1. Real-time process monitoring 2. High sensitivity and precision 3. Automated calibration 4. EUV readiness 5. Innovative electron multiplier 6. Maximized uptime

Datasheet

Product Datasheet
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Supplier Information

In
Inficon
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<p>INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process-control software that enhance productivity and quality in vacuum-based manufacturing. Its analysis, measurement and control products are widely used in semiconductors, thin-film coating, flat-panel displays, solar cells, automotive and refrigeration leak detection, life sciences and more. Headquartered in Switzerland (listed on SIX as IFCN), INFICON established its China operation (a wholly owned subsidiary) with a Shanghai manufacturing plant in 2006 and sales offices in Beijing, Shanghai, Guangzhou and Hong Kong.</p>

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