Transpector APX Residual Gas Analyzer
The Transpector APX Residual Gas Analyzer is a cutting-edge solution for advanced semiconductor processes, offering real-time monitoring and precision measurement for applications such as ALD, CVD, PVD, and etch processes.
Save to Favorites
Overview
Specifications
| Parameter | Value |
|---|---|
| Maximum Pressure | 1to100mbar, 1to200mbar, 1to1500mbar |
| Ion Source Type | Closed Ion Source |
| Total Pressure Range | 5E-10to1E-3mbar, 5E-10to1E-3mbar, 5E-10to1E-3mbar |
| Minimum Usable Operating Pressure | 1E-7mbar, 1E-7mbar, 1E-7mbar |
| Maximum Operating Pressure | 1E-3mbar, 1E-3mbar, 1E-3mbar |
| Sensitivity (Ar) | 1E-4A/mbar, 1E-4A/mbar, 1E-4A/mbar |
| Sensitivity (Ar, FC Mode) | 1E-4A/mbar, 1E-4A/mbar, 1E-4A/mbar |
| Minimum Detectable Partial Pressure | 2E-15mbar, 2E-15mbar, 2E-15mbar |
| Maximum Total Pressure | 1E-3mbar, 1E-3mbar, 1E-3mbar |
| Maximum Detectable Pressure | 1E-3mbar, 1E-3mbar, 1E-3mbar |
| Maximum Background Pressure | 1E-3mbar, 1E-3mbar, 1E-3mbar |
| Dimensions | Refer to product brochure |
Applications
Key Features
Datasheet
Supplier Information
Related Products
-
VOCs Optical Gas Imaging Thermal Camera
Gas Analysis
Ulirvision
Type: Cooled high sensitivity detector Pixel Pitch: 30μm
-
CO2 Optical Gas Imaging Thermal Camera
Gas Analysis
Ulirvision
Type: Cooled high sensitivity detector Pixel Pitch: 30μm
-
SF6 | NH3 Gas Leak Detection Infrared Thermal Camera
Gas Analysis
Ulirvision
Type: Cooled Quantum Well Detector (QWIP) Pixel Pitch: 15μm
-
AQ7100 Micro Ambient Air Quality Monitoring System
Gas Analysis
Wayeal
Monitoring Factors: SO2、NO2、CO、O3、PM2.5、PM10 Meteorological Parameters: 风速、风向、温度、湿度、大气压 Monitoring Network Mode: 高密度网格化布局、群防式协同监测网络
The AQ7100 Micro Ambient Air Quality Monitoring System is a low-cost, multi-parameter integrated compact ambient air monitoring system developed by WAYEAL based on its extensive experience in the environmental monitoring field. Through a scientific and rational 'combined point placement' deployment scheme, the system targets various monitoring objects and parameters such as urban residential areas, industrial parks, regional boundaries, road traffic, and pollutant transmission channels, forming a 'group-prevention' collaborative monitoring network and a professional data calibration system. It achieves full coverage of the environmental monitoring network, enables high temporal-spatial resolution air pollution monitoring, and combines information-based big data applications to realize pollution source tracing, early warning and forecasting, providing timely and effective decision support for environmental pollution prevention and control.
-
AQ7800 Ambient Air Non-Methane Total Hydrocarbons Continuous Monitoring System (Direct Measurement Method)
Gas Analysis
Wayeal
Detection Method: GC-FID Measurement Method: 直测法（Direct Measurement） Measured Components: 甲烷、非甲烷总烃（CH4、NMHC）
The AQ7800 is a methane and non-methane hydrocarbon analyzer independently developed by WAYEAL for direct measurement of non-methane total hydrocarbons (NMHC) in ambient air. Based on the GC-FID method, the instrument performs backflushing and enrichment processing on the sampled gas to directly measure methane and NMHC concentrations, enabling accurate measurement of higher-concentration NMHC. It complies with HJC-ZY84-2020 'Technical Requirements and Detection Methods for Ambient Air Non-Methane Total Hydrocarbons Continuous Monitoring System'. During operation, ambient air enters the sampling system at a constant flow rate; after dust removal, it is enriched and dehydrated at low temperature through a large-capacity composite trap column. With MFC superimposed sampling volume, valve switching and backflushing, methane and total hydrocarbons are separated into individual peaks for direct concentration determination. The fully heat-traced detection module effectively prevents loss of high-boiling-point and high-concentration samples, achieving a detection limit of ≤1ppbC, superior to the 20ppbC required by the latest standard.
Related Articles
Founded in 2019, Jilin JC Ultrafast Equipment Co., Ltd. is a high-tech enterprise incubated by the Ultrafast Optoelectronics Center of Jilin University. Our R&D team owns 15 years of profound experience in femtosecond laser micro-nano fabrication.
CytoViva delivers comprehensive hyperspectral imaging solutions covering visible to near-infrared spectrum, compatible with brightfield, fluorescence and proprietary enhanced darkfield microscopy modes.
A solid-state laser is one of the most common and reliable laser types used in modern industry, medical equipment, and scientific research. Unlike gas or fiber lasers, it uses solid materials as its gain medium to generate stable, high-brightness laser beams. Thanks to its high precision, long lifespan, and compact structure, solid-state lasers have become a mainstream solution for high-precision laser processing and optical systems.
Laser pump sources are the core energy input component of solid-state lasers and laser amplifiers, and their performance directly determines the output power, beam quality and service life of the entire laser system. In scenarios such as industrial processing, scientific research experiments and high-end equipment, improper pump source selection will not only result in substandard system performance, but also bring a series of problems such as rapid device degradation and high operation and maintenance costs. This article sorts out the core selection logic and key pitfalls of pump source procurement, and provides selection references based on mature, mass-produced high-reliability products to help purchasers efficiently screen suitable products.
Loading...
Name
Phone
Organization
Use Case
Database Platform