Front Load Dual Sensor
The Front Load Dual Sensor offers proven reliability and durability, featuring dual crystals for backup and a pneumatically driven shutter for easy crystal replacement. It is designed for applications requiring precise deposition rate monitoring in vacuum systems.
Specification Snapshot
Size (maximum envelope without shutter)
39.12×82.04×49.54mm (1.54×3.23×1.95in)
Water Tube and Coax Length
762mm (30in)
Materials - Connector
Stainless Steel
Materials - Connector
Teflon
Materials - Connector
and Glass Insulated
Crystal Diameter
0.550in (13.97mm)
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Overview
The Front Load Dual Sensor offers proven reliability and durability, featuring dual crystals for backup and a pneumatically driven shutter for easy crystal replacement. It is designed for applications requiring precise deposition rate monitoring in vacuum systems.
Specifications
| Parameter | Value |
|---|---|
| Maximum Bakeout Temperature | 130°C |
| Maximum Operating Isothermal Environment Temperature | 400°C |
| Size (maximum envelope without shutter) | 39.12×82.04×49.54mm (1.54×3.23×1.95in) |
| Water Tube and Coax Length | 762mm (30in) |
| Crystal exchange | Front-loading, self-contained package |
| Mounting | Two #4-40 tapped holes on the back of the sensor body |
| Materials - Body and Holder | 304 Type Stainless Steel |
| Materials - Springs | Au Plated Be-Cu |
| Materials - Water Tubes | S-304, 3.175mm (0.125in) OD×0.381mm (0.015in) Wall Thickness Seamless Stainless Steel Tubing |
| Materials - Connector | Stainless Steel |
| Materials - Connector | Teflon |
| Materials - Connector | and Glass Insulated |
| Materials - Insulators | >99% Al₂O₃ |
| Materials - Wire | Teflon Insulated Copper |
| Materials - Other Mechanical Parts | 304 or 18-8 Stainless Steel |
| Materials - Braze | Vacuum Process High Temperature Ni-Cr Alloy |
| Crystal Diameter | 0.550in (13.97mm) |
| 1-Inch Bolt and Ultra-Torr Compression Fitting Materials | 304 Stainless Steel, Teflon, Ceramic, Beryllium Nickel, VITON |
| 1-Inch Bolt and Ultra-Torr Compression Fitting Temperature | 300°C with water cooling or 165°C without |
| CF40 Welded Terminations Materials | 304 Stainless Steel, Teflon, Ceramic, Beryllium Nickel |
| CF40 Welded Terminations Temperature | 450°C with water cooling or 165°C without |
Applications
1. Vacuum deposition processes 2. Thin film monitoring 3. Semiconductor manufacturing 4. Optical coating
Key Features
1. Dual crystals for backup 2. Pneumatically driven crystal shutter 3. Easy installation and maintenance 4. Adjustable length with compression fittings 5. Fully grounded crystal electrode to eliminate RF interference
Datasheet
Product Datasheet
PDF
Supplier Information
<p>INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process-control software that enhance productivity and quality in vacuum-based manufacturing. Its analysis, measurement and control products are widely used in semiconductors, thin-film coating, flat-panel displays, solar cells, automotive and refrigeration leak detection, life sciences and more. Headquartered in Switzerland (listed on SIX as IFCN), INFICON established its China operation (a wholly owned subsidiary) with a Shanghai manufacturing plant in 2006 and sales offices in Beijing, Shanghai, Guangzhou and Hong Kong.</p>
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