Front Load Dual Sensor

Front Load Dual Sensor

Supplier
Inficon
Part Number
Front Load Dual Sensor
Category
Sensors
Origin
China

The Front Load Dual Sensor offers proven reliability and durability, featuring dual crystals for backup and a pneumatically driven shutter for easy crystal replacement. It is designed for applications requiring precise deposition rate monitoring in vacuum systems.

Specification Snapshot
Size (maximum envelope without shutter)
39.12×82.04×49.54mm (1.54×3.23×1.95in)
Water Tube and Coax Length
762mm (30in)
Materials - Connector
Stainless Steel
Materials - Connector
Teflon
Materials - Connector
and Glass Insulated
Crystal Diameter
0.550in (13.97mm)
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Overview

The Front Load Dual Sensor offers proven reliability and durability, featuring dual crystals for backup and a pneumatically driven shutter for easy crystal replacement. It is designed for applications requiring precise deposition rate monitoring in vacuum systems.

Specifications

ParameterValue
Maximum Bakeout Temperature130°C
Maximum Operating Isothermal Environment Temperature400°C
Size (maximum envelope without shutter)39.12×82.04×49.54mm (1.54×3.23×1.95in)
Water Tube and Coax Length762mm (30in)
Crystal exchangeFront-loading, self-contained package
MountingTwo #4-40 tapped holes on the back of the sensor body
Materials - Body and Holder304 Type Stainless Steel
Materials - SpringsAu Plated Be-Cu
Materials - Water TubesS-304, 3.175mm (0.125in) OD×0.381mm (0.015in) Wall Thickness Seamless Stainless Steel Tubing
Materials - ConnectorStainless Steel
Materials - ConnectorTeflon
Materials - Connectorand Glass Insulated
Materials - Insulators>99% Al₂O₃
Materials - WireTeflon Insulated Copper
Materials - Other Mechanical Parts304 or 18-8 Stainless Steel
Materials - BrazeVacuum Process High Temperature Ni-Cr Alloy
Crystal Diameter0.550in (13.97mm)
1-Inch Bolt and Ultra-Torr Compression Fitting Materials304 Stainless Steel, Teflon, Ceramic, Beryllium Nickel, VITON
1-Inch Bolt and Ultra-Torr Compression Fitting Temperature300°C with water cooling or 165°C without
CF40 Welded Terminations Materials304 Stainless Steel, Teflon, Ceramic, Beryllium Nickel
CF40 Welded Terminations Temperature450°C with water cooling or 165°C without

Applications

1. Vacuum deposition processes 2. Thin film monitoring 3. Semiconductor manufacturing 4. Optical coating

Key Features

1. Dual crystals for backup 2. Pneumatically driven crystal shutter 3. Easy installation and maintenance 4. Adjustable length with compression fittings 5. Fully grounded crystal electrode to eliminate RF interference

Datasheet

Product Datasheet
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Supplier Information

In
Inficon
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<p>INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process-control software that enhance productivity and quality in vacuum-based manufacturing. Its analysis, measurement and control products are widely used in semiconductors, thin-film coating, flat-panel displays, solar cells, automotive and refrigeration leak detection, life sciences and more. Headquartered in Switzerland (listed on SIX as IFCN), INFICON established its China operation (a wholly owned subsidiary) with a Shanghai manufacturing plant in 2006 and sales offices in Beijing, Shanghai, Guangzhou and Hong Kong.</p>

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