SemiQCM SR Sensor
INFICON SemiQCM SR sensors, installed on a chamber wall or foreline of a semiconductor tool, offer a proven solution for material deposition monitoring, clean endpoint detection, precursor ampoule depletion, and precursor delivery fault detection. The sensor is capable of monitoring a sub-monolayer level of mass change, ideal for most advanced CVD and ALD processes.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Maximum temperature | 200°C |
| Sensor Head Size (Maximum Envelope) | 23.9mm O.D.×29.2mm (0.94in. O.D.×1.15in.) |
| Sensor Length (in Vacuum) | 50–150mm (1.97–5.91in.) |
| Mounting feedthrough | ISO KF/CF flange |
| Body and Holder Materials | 304 stainless steel |
| Springs | Au-plated BeCu |
| Coax line | 4.8mm (0.188in.) O.D. stainless steel |
| Other mechanical parts | 18-8 or 304 stainless steel, nickel C276 |
| Insulators | >96% Al2O3 in vacuum; Teflon used elsewhere |
| Wire | Ni in vacuum, Ni-plated Cu elsewhere |
| Braze | Vacuum-process high-temperature NiCr alloy |
| Crystal Diameter | 14.0mm (0.551in.) |
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