CrystalSix Sensor
The CrystalSix Sensor is designed for high-quality and reliable thickness monitoring in processes such as OLED, MBE, solar, and long optical coating. It features six crystals per sensor to maximize PVD production and minimize cost. The sensor automatically rotates a new crystal into position when the current one fails, ensuring uninterrupted deposition rate monitoring.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Maximum Bakeout Temperature | 130°C |
| Maximum Operating Isothermal Environment Temperature | 400°C |
| Water, Air, and Coax Length | 76cm (30in.) |
| Crystal exchange | Front-loading, extraction tool required |
| Mounting | Six #4-40 tapped holes on the back of the sensor body |
| Size | 9.7cm (3.8in.) DIA x 5.1cm (2.0in.) high |
| Minimum Water Flow | 150-200cc/min, 30°C max |
| Regulated Air Supply | 80-90PSIG (5.5-6.2bar) |
| Materials - Plate, Holders, Mechanical Parts | 304 type stainless steel |
| Materials - Springs, Electrical Contacts | Au plated Be-Cu, Au Plate Inconel, 303 stainless steel |
| Materials - Water and Air Tubes | S-304, 0.32cm (0.125in.) O.D. x 0.04cm (0.016in.) wall thickness 76cm (30in.) seamless stainless steel tubing |
| Connector | Stainless steel |
| Insulators | >99% Al₂O₃ |
| Cable | Teflon insulated copper |
| Crystal | 14mm (0.550in.) diameter |
| Body and Carousel | 2024 T351 aluminum |
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